EDS measurement of gold (Au)
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The most intense EELS signal from gold (Au) can be obtained from Au M4,5-edges at 2206 eV in the high core-loss spectrum, and the optimized EDS signal from Au is obtained from Au Lα1 (9.711 keV) and Au Lα2 (9.628 keV). With such EELS and EDS signals with the same dwell time (e.g. in simultaneous EDS and EELS measurements), for a thin TEM sample the EELS signal is more than twice as sensitive as the EDS data and the signal-to-noise ratio (SNR) for EELS measurement is four times better than that for EDS data.

The second choice for Au EDS elemental analysis is that the Au Mα line at 2.12 kV can be used.

Table 1357 lists the comparison of EELS and EDS measurements on thin TEM samples with Au elements. The comparisons are based on the same data acquisition condition, consequently the same electron dose used.

Table 1357. Comparison of EELS and EDS measurements on TEM samples with Au elements.
Measurement Signal Energy Signal ranking
EELS M4,5-edges 2206 eV Most intense EELS signal, more intense than EDS signal
EDS Lα1 9.711 keV Most intense EDS signal, weaker than EELS M4,5-edges signal
Lα2 9.628 keV
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