EDS Measurement of Palladium (Pd)
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Table 1394 lists the comparison of EELS and EDS measurements on thin TEM samples with Pd elements. The comparisons are based on the same data acquisition condition, consequently the same electron dose used.

Table 1394. Comparison of EELS and EDS measurements on TEM samples with Pd elements.
Measurement Signal Energy Signal ranking
EELS M4,5-edges 335 eV Very strong signal and highest contrast, often used
EELS L2,3-edges 3170 eV Sufficient signal, can be used for analysis if needed
EDS Lα lines 2.84 kV Often used in EDS measurement, but it is worse than M4,5-edges in EELS

The EDS spectrum in Figure 1394 was taken from a nanoparticle (with Pt and Pd compositions of 50 at.% : 50 at.%) on holey carbon (C) film supported by a copper TEM grid. The copper signal in the spectrum was from the Cu grid (see page4638).

EDS spectrum taken from a nanoparticle with Pt and Pd compositions

Figure 1394. EDS spectrum taken from a nanoparticle with Pt and Pd compositions.


 

 

 

 

 

 

 

 

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