Electron microscopy
 
Specimen Quality Depending on Sample Tilting in FIB
- Practical Electron Microscopy and Database -
- An Online Book -
Microanalysis | EM Book                                                                                   http://www.globalsino.com/EM/        

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In general, in FIB-TEM specimen preparations, a sample tilt angle of ±2° from the vertical position provides optimum wedge removal conditions, and thus the milled film remains crystalline. The degree of amorphization/phase transformation is higher for greater tilt angles.

 

 

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