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Spherical aberration correction in EMs can induce a probe-current-density increase by a factor of 4 to 9. Not only will this enhance the
signal-to-noise ratio of STEM images but also the signals for analytical electron
microscopy, for instance, energy-dispersive X-ray spectroscopy (EDX) and electron
energy-loss spectroscopy (EELS).
Table 2588. Examples of collection angles of EELS measurement in different microscope conditions.
| Accelerating voltage |
STEM |
Beam current |
Probe size |
Collection angle |
Aberration corrector |
reference |
| 200 keV |
CFEG |
7 pA |
0.12 nm |
31 mrad |
No corrector |
[1] |
| 100-200 pA |
|
15-25 mrad |
Cs-corrected |
[1] |
| 780 pA |
|
|
Cs/C5--corrected |
[1] |
[1] Peter W. Hawkes, Advances in Imaging and Electron Physics: Aberration-corrected Electron Microscopy, Volume 153, 2008.
|
