SEM Resolution Affected by Delocalization of Inelastic Scattering
- Practical Electron Microscopy and Database -
- An Online Book -

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This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.
 

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The resolution of HR-SEM is affected by the delocalization of inelastic scattering, therefore, this resolution should be improved as the accelerating voltage of the incident electron beam is reduced.

 

 

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