Electron microscopy
 
Failure Analysis of ICs with FIB
- Practical Electron Microscopy and Database -
- An Online Book -
Microanalysis | EM Book                                                                                   http://www.globalsino.com/EM/        

This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.
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At 15 kV of accelerating voltage of the incident electron beam in dual-beam SEM/FIB, the interaction volume for generation of secondary electrons (SEs) is on the order of microns through SiO2 in microelectronic materials, which allows identification of a defect before actually milling through it.

 

 

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