Electron-Beam Deflecting/Scanning Coil Control System in EMs
- Practical Electron Microscopy and Database -
- An Online Book -

http://www.globalsino.com/EM/  



 

This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.

 

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A deflector for electron-beam deflection in EMs has been applied to align, tilt, shift, scan the electron beam, and so on. The deflector, usually including a pair of deflection coils, is called the double-deflection system.

Figure 4225a shows an example of SEM systems. In all EMs (electron microscopes), electron-beam deflecting/scanning coils are controlled by electron-beam deflecting/scanning coil control systems. For instance, the electron beam is scanned on the specimen by the electron-beam deflecting/scanning coil control system.

Example of computer-controlled EMs: SEM system

Figure 4225a. Example of computer-controlled EMs: SEM system.

Figure 4225b shows the structure of the electron probe-forming system in STEM mode in JEOL JEM-2010F TEMs.

Schematic illustration of the probe-forming electron optics in STEM mode in JEOL JEM-2010F TEMs

Figure 4225b. Schematic illustration of the probe-forming electron optics in STEM mode in JEOL JEM-2010F TEMs.

The scan coil in SEM is schematically shown in Figure 4225c.

Schematic diagram of an SEM system with a thermionic electron gun

Figure 4225c. Schematic diagram of an SEM system with the scan coil indicated.

 

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