Effect of Chromatic Aberration on Fine Structure Analysis using EFTEM
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The chromatic aberration remains or is even increased after using multipoles to correct spherical aberration. This energy spread degrades the spatial resolution in EFTEM imaging and also induces peaks broadening in an energy-loss spectrum, resulting in reduction of the amount of observable fine structure.

In EFTEM imaging, an important contribution for low-loss imaging is the delocalization of the inelastic scattering process itself, while at much higher energy-losses the resolution-limiting parameter is usually the chromatic aberration. For instance, to lower the effect of the chromatic aberration, the accelerating voltage needs to be 300 kV if one expects a resolution better than 0.3 nm for >100 eV energy-loss [1].




[1] R.F. Egerton, Electron Energy-Loss Spectroscopy in the Electron Microscope, 2nd Edition, Plenum Press, New York, 1996.



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