The main drawback of the STEM images is the distortion along the slow scan direction, known as the so-called “fly-back” error. [1]

[1] J.H. Chung, G.D. Lian, L. Rabenberg, Practical and Reproducible Mapping of Strains in Si Devices Using Geometric Phase Analysis of Annular Dark-Field Images From Scanning Transmission Electron Microscopy, Ieee Electr Device L, 31 (2010) 854-856.