Electron microscopy
  
C40 Structure
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Schematic representation of plane stacking in the C11b structure

Figure 975a. Schematic representation of plane stacking in the C40 structure.

Two dimensional atomic arrangement in die stacking plane for the C54, C40 and C11b

Figure 975b. Two dimensional atomic arrangement in die stacking plane for the C54, C40 and C11b. [1]

 

 

 

 

 

 

 

 

 

 

 

[1] A. Mouroux, Understanding the formation of TiSii in the presence of refractory metals for Si technology, Acta Univ. KTH (Stockholm, Sweden, 1999).

 

 
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