Table of Contents/Index
Chapter/Index:
Introduction
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A
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B
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C
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D
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E
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F
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G
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H
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I
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J
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K
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L
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M
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N
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O
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P
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Q
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R
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S
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T
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U
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V
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W
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X
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Y
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Z
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Appendix
Chapter D
d shell electrons
Outer d shell electrons
d-spacings/real crystal spacings & d-Ratio
d-spacing ratios of allowed Bragg reflections for some space groups
D-SUB 44 connector
Damage:
I. Damage Overview:
Damage of materials due to electron irradiation in EMs
Damage cross section of atoms from electron irradiation
Dependence of radiation damage on accelerating voltage of electrons
Sample damage in TEM measurements
Electron beam damage depending on TEM/SEM specimen thickness
Atom loss during EM measurements
Cross section for bulk and surface diffusion induced by electron irradiation
Cross-sections of atom displacement due to electron irradiation in bulk
Displacement damage
Preferential electron-beam etching of grain boundaries
II. Damage:
Removal of atoms (knock-on/sputtering) due to electron irradiation in EMs
Sputtering/knock-on of atoms from beam-exit surface of TEM sample
Cross-sections of surface sputtering/knock-on induced by electron irradiation
III. Damage:
Ionization damage in EMs
IV. Damage induced artifacts
EDS artifacts induced by beam damage
Elemental loss in EM specimen detected by EDS
V. Damage solutions & monitoring
Electron beam damage monitored by EELS
Low e-beam current density to minimize specimen damage in EELS measurements
Step size used for beam damage reduction during elemental mapping
EM improvements for reducing beam damage
Coating of TEM specimen to reduce beam damage & sputtering
VI. Damage: Others
Problems/damage of apertures
Damage of TEM specimen holder
Damage of EDS detectors
Ion-beam induced structural change/damage at surfaces in FIB
Damping envelope in TEM imaging
Temporal-coherence envelope function
TEM/STEM characteristics affected by CTF damping
Dangling-bonds
Dangling-bonds in grain boundaries
Dark current noise
Dark current and its removal in EELS and EFTEM
Dark-field (DF) imagings
Dark-field (DF) imaging in TEM
Beam tilt with dark-field deflection coils
Annular dark-field (ADF) scanning transmission electron microscopy (STEM)
ADF-TEM (annular dark-field transmission electron microscopy) aperture
Data acquisition and analysis using PC in EMs
Data acquisition times of various techniques
de Broglie wave equation
Dead time in EDS measurement
Dead layers in EDS detectors
Debye phonon model
Debye-Scherrer rings in electron diffraction patterns
Decagonal quasicrystal
Decay probability from initial state to final state
De-excitation process of electrons
Deconvolution
TEM image processing and deconvolution
Deconvolution in EELS
Fourier–log deconvolution in EELS
Fourier-ratio method for EELS deconvolution
Deconvolution for noise reduction in EEL spectra
Dependence of single and multiple inelastical scatterings of electrons on TEM sample thickness
Richardson-Lucy deconvolution
Maximum-entropy deconvolution
Deconvolution in EDS analysis
Dedicated STEM (DSTEM) systems
Defect:
Lens defects
Deep level states in band gap analyzed by EELS
Defects in materials
TEM analysis of defects in amorphous materials
Defect analysis by TEM/STEM
Interfacial defects
Point defects
Defects in metallic glasses
Bulk defects
Defects in crystals
Line defects
Dark patches
Dissociation
Defects in crystalline materials in LEDs
Generation of defects in crystals
Anisotropy of thermal expansion coefficients due to defects
Theoretical interpretation of STEM/TEM images about crystalline defects
Determination of Burgers vector of lattice defects
Generation of defects in crystals depending on cooling rates
{113} or {311} defects
Defects in crystals formed by ion-implantation and annealing
Analysis of crystal deformation/distortion
Deficiency lines in zero-order disc in CBED patterns
Deflection angle in electron holography
Double arrow annotation on Gatan DigitalMicrograph
Deflector/double-deflection system in EMs
Electron-beam deflecting/scanning coil control system
Double deflection scan coils in STEMs
Shutter used in EELS and EFTEM measurements
Beam blanking deflector in EMs and FIB
Defocus/defocus (aberration) in EMs
: General
Defocus spread/fluctuation in EMs
Focusing/defocusing action in EMs
Focusing action of lens
Defocus induced by chromatic aberration/energy deviation in electrons
Standard deviation of the Gaussian distribution of defocus due to the chromatic aberration
Defocus/defocus:
Defocus/focus in TEM imaging
Scherzer defocus
Gabor defocus
Lichte’s defocus
In-focus in TEM imaging
Focusing sensitivity in TEM imaging
Standard focus/Eucentric height versus sample tilt in TEM
Wavefunction in defocusing plane in TEM imaging
Defocus affecting Fresnel fringes in TEM images
Phase shift from defocus and spherical aberration
Aberration coefficients determined by defocus-based techniques
Minimum (phase-)contrast in (HR)TEM imaging with Gaussian defocus
Maximum (phase-)contrast in (HR)TEM imaging (with Scherzer defocus)
Best/optimum defocus condition for HRTEM imaging
Defocus/underfocus and its TEM contrast
Defocus series in TEM imaging
TEM defocusing imaging of interfaces
Defocus/defocus: Diffraction
Focus of electron diffraction in TEM
Defocus/defocus: STEM
Defocused convergent incident electron beam
HRSTEM image contrast as function of defocus
Defocus series in STEM imaging
Sensitivity of STEM contrast to focus
Sensitivity of CTF to defocus of objective lens
Defocus/defocus: EFTEM/EELS
Spectrum focus adjustment in EFTEM
Dependence of defocus on EELS and quantitative analysis
Effects of defocus on EELS
DeGauss function in EMs
Delay:
RC time delays in ICs
Delocalization
Contrast delocalization/blurring effect in TEM images
SEM resolution affected by delocalization of inelastic scattering
Delocalization of EELS measurements
Delocalization in inelastic scattering
Image localization in STEM
Delta-type aberration correctors
Demonstrations by EM manufacturers
Dendrites
Nano-dendrites and their formation
Densities in materials
(Atomic) density of different materials
Packing density in some crystal planes
TEM contrast/fringes at interface between two materials
Density of valence electrons of materials
Density of states (DOS)
Partial density of states (PDOS)
Density-functional theory (DFT)
Density-functional theory (DFT) simulations of EELS profiles
Joint density of states (JDOS)
Diffraction aperture, field limiting aperture, selected area diffraction aperture
Deformation (plastic)
Demagnification in EMs
Desktop/portable/tabletop SEM
Descan of electron beam in (S)TEM
Desktop computers
Detective quantum efficiency (DQE) in EELS and imaging system
Deposition
FIB (ion beam) induced deposition (IBID)
Charging enhanced electron/ion-beam-induced-deposition
Material growth on convex surfaces
Gallium contamination due to FIB milling & in FIB deposits
Laser beam direct writing (LBW)
Deposition:
Electron beam-induced deposition (EBID)
Amorphization of materials induced by e-beam Pt deposition
Depth
Depth of field in EM
Depth of focus in EM
Depth sensitivity & spatial resolution of EBSD
Depth sensitivity of REELS & Dependence of depth on primary electron beam energy/incident angle/collection angle
Penetration depth/implant depth/trajectory of ions in FIB milling
Destructive: Visual inspection for destructive and/or nondestructive analysis of IC chips
Detector envelope function for EM imaging
Detectors
Detectors for SEM
Secondary electron detecting/amplifying system in EMs
Contribution of transfer properties of detector to diffractograms
EBSD detector
HAADF detectors
Determination of unknown crystal structures
and space groups
CBED pattern symmetries for crystal determination
Phase identification procedure by CBED
Indexing CBED patterns
Existing of extinction bands within forbiddden reflections in CBED patterns
Determination of crystal structures using electron diffraction technique
Determination of crystal structures using HRTEM technique
Departure from Friedel’s law in CBED patterns
Deviation parameter/excitation error of Bragg reflections
Dew Point
Diameter of electron beam
Dielectric materials
High-k dielectric materials
Static or low-frequency dielectric constant
Bandgap energies of dielectrics
Dielectric constant of ferroelectric crystals
Ferroelectric dielectric hysteresis & hysteresis loop
Linear lossless dielectrics
Linear lossy dielectrics
Non-linear lossless dielectrics
Non-linear lossy dielectrics
Dielectric response/function of material valence electrons
Dielectric-constant determination by EELS
Diamond
Extinctions and weak spots showing in electron diffraction patterns of diamond
Diffraction comparison between different cubic crystal structures
Solid solubility of various impurities in carbon/diamond
Diamond structure
Differential correlation function
Difficulties/challenges: advanced EM-related measurements and analyses
Differential cross section of total (elastic & inelastic) electron scattering
Cross section: Inelastic differential (introduction & theory)
Diffraction
Diffraction of plane wave from multiple point sources
X-ray diffraction
Electron diffraction in TEM
Fraunhofer diffraction
Intermediate/diffraction lens
Diffraction-induced artifacts in measurements
Channelling/diffraction enhanced X-ray emission in EDS measurements
Diffuse diffraction streaks in electron diffraction from columnar substructures
Diffuse scattering (incoherent scattering) of electrons in TEM
Diffuse scattering in electron diffraction due to crystalline disorder
Diffused and polysilicon resistors
Diffusion of atoms in materials
Diffusionless phase transformation
Activation energy of diffusion
Vacancy detection by elemental diffusion
Diffusion coefficients
Diffusion coefficients of elements in various materials
Diffusion/penetration/diffusivity of elements through grain boundaries
Diffusion/diffusivity of elements through single crystals
Diffusion/diffusivity of elements through surfaces
Diffusion pump
Differential pumping aperture (DPA) in EMs
Silicon oils from diffusion pump
DigiScan
Set flyback time in DigiScan image to avoid image distortion
Gatan FireWire adapter (GFA) (DigiScan/Compliant/Legacy ) software/hardware
Digital
Digital electro-optical imaging sensor
Digital holography
Digital imaging camera
Gatan Digital Micrograph
Rewritable digital versatile disks
Digital-filtered least-squares peak fitting for EDS quantification
Dimension/size
Dimethylacetamide (DMAc)
Dimers
Energy level diagrams for single atoms, dimers, clusters & bulk materials
Diodes
Semiconducting light-emitting diodes (LEDs)
Semiconducting laser diodes (LDs)
Dipole design for C
s
corrector in EMs
Dipole transitions in electron excitations
Direct
Interference between direct and diffracted beams in TEM
Direct bandgap
Direct methods
Direct interband transition
Direction of spontaneous polarization in ferroelectrics
Directions in lattice system of crystals
Angle between directions
Close packed planes and directions in crystals
Director/manager of electron microscope labs
Disadvantages
Discharging and charging in electron guns
Discrete/continuous/fast Fourier transform (DFT/CFT/FFT)
Designs
Consideration of X-radiation protection in EM design
Disk size/radius in CBED
Dislocations in crystals
Sense vector
Vector description of crystal dislocations
Visibility/contrast of dislocations and stacking faults in TEM and EMs
Frank’s rule in dislocation theory
Dislocation node
SiGe/Si system and its defects
Misfit dislocation: Lattice mismatch versus misfit dislocation separation
Extra energy introduced by dislocations
Dislocation density
Dislocation detection by CBED and LACBED
Ostwald ripening/coarsening of dislocation loops
Perfect dislocations
Widths of dislocations
Determination of Burgers vectors of dislocations
Dislocation cores
Dislocation formation during TEM observation
Dislocations:
Burgers vector
Determination of Burgers vectors of dislocations
Burgers circuit
Burgers vectors of dislocations (Tables)
Dislocations:
Edge dislocations
Dislocation loops
Clustering of vacancies into dislocation loops
Glide and dislocation loops
Dislocations: Mixed dislocations
Motion and slip of mixed dislocation
Dislocations:
screw dislocation
Screw dislocation formation due to shear stress
Types of screw dislocations
Disorder
Bonding disorder in materials
Diffuse scattering in electron diffraction due to crystalline disorder
Displacements
Electron-beam-tilt-induced image displacement in TEM
Atomic displacement parameter/factor & mean-square atomic displacement
Displacement of atoms due to electron irradiation in EMs
Displacement energy for bulk and surface diffusion induced by electron irradiation
Elemental (atomic) displacement threshold due to electron irradiation in bulk
Displacement energy for surface sputtering/knock-on induced by electron irradiation
Elemental (atomic) displacement threshold of chemical elements due to electron irradiation at sample surface
Cross-sections of atom displacement due to electron irradiation in bulk
Elemental (atomic) displacement threshold due to electron irradiation
Energy transfer for atomic displacement/knock-on process due to electron irradiation
Displacement energy for atoms in bulk and at sample surface due to electron irradiation
Displacive ferroelectrics
Distance between two electrons in electron beam in EMs
Distortions
Projector lenses and image distortion in EMs
Image distortion correction in FETEM
Set flyback time in DigiScan image to avoid image distortion
Correction of electron beam distortion in EMs
Artifacts in off-axis electron holograms: distortions
Distortion/asymmetry of X-ray peak from Gaussian shape in EDS
Distribution of secondary electrons in SEM
Angular distribution
Divergent lenses
Dodecagonal quasicrystal
Dodecapole/hexapole/double-hexapole/sextupole design for C
s
corrector in EMs
Domain in ferroelectric materials
Angle between polarization vectors of adjacent domains in various crystalline phases in ferroelectrics
Dopant
Techniques for dopant profiling in semiconductors
SEM contrast dependence on dopants in semiconductors
Measurement of electric field/dopant/p-n junction using off-axis electron holography
Dependence of dopant contrast in Si on accelerating voltage of primary electron in SEM
Dopant-selective etching/staining in IC analysis
Dopant deactivation induced by FIB sample preparation
Change of lattice parameter due to doping
Dose
Electron dose of electron beam
Measurement of probe current
Electron dose inducing material damage in bulk and at sample surface
Ion irradiation dose
Minimum electron dose for sufficient EELS counts
Low dose TEM/STEM imaging
Double cross-sections for examination of damage of prepared EM sample surface
Double deflection scan coils in STEMs
Double perovskite crystalline structures
Drifts
EELS spectrum energy (and zero-loss) drift
Electron beam drift/instability/movement in TEMs/STEMs
Specimen drift/instability/movement in TEMs/STEMs
Contribution of specimen drift to diffractograms
Drift tube in GIF system
Spatial resolutions limited by specimen drifts
Spatial drift & its correction in EFTEM imagings
Drift & jump of EEL spectra or images
Degradation of EDS spatial resolution due to specimen drift
Degradation of EELS spatial resolution due to specimen drift
Driving force for the phase transition in materials
Drude-Lorentz model
Dual beam FIB/SEM
Dynamic characteristics of voltage contrast
Dynamic range of camera
Dynamical effects of PED (precession electron diffraction)
Dynamical scattering of electrons in thick TEM specimen
Pendellösung/Pendellosung fringes in crystals
Dynamical theory for energetic electron-matter interaction
Dynamical extinction lines in CBED patterns
Double/multiple diffraction in electron diffraction patterns
Two-beam dynamical electron scattering/diffraction
Dwell times
Dwell time/scan speed in TEM/STEM imaging and elemental mapping