Practical Electron Microscopy and Database

An Online Book, Second Edition by Dr. Yougui Liao (2006)

Table of Contents/Index

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

Gabor defocus			Gabor’s (in-line) holography
Gadolinium
Gadolinium doped ceria oxide (GDC)
Gain
Gain variations in GIF, CCDs & EELS channels			Additional spots due to inadequate gain normalization (in diffractograms obtained by Fourier transformation)
Gain normalization for EELS measurement
Gallium (Ga)
EDS measurements of gallium			EELS of gallium (Ga)
AlGaInP			AlGaAs
ZnSSe-based/GaAs heterostructures			GaN
GaP			GaAs
Compound semiconductor			Gallium contamination due to FIB milling & in FIB deposits
Gallium source in dual beam FIB/SEM & single beam FIB			Ga ionic sputter yield in Ga-based FIB & SIMS
Fraction of backscattered Ga ion in FIB milling and SIMS measurement

Gamma rays
Garnets
Ce-doped Yttrium-Aluminum Garnet (YAG)
Gas
EELS of gaseous atoms and molecules			Gas-assisted etching in FIB milling

Gaskets in EMs
Gatan software
Introduction of digital micrograph			Gatan Imaging Filter (GIF) software package
GIF mapping module in Digital Micrograph			Gatan FireWire adapter (GFA) (DigiScan/Compliant/Legacy ) software/hardware
Tags on Gatan Digital Micrograph			Sharpen filter
Line Annotation with and without Length label on DM			Arrow annotation on DM
Double arrow annotation on Gatan DigitalMicrograph			Box (rectangle) annotation on Gatan DigitalMicrograph
Oval annotation on Gatan DigitalMicrograph			Spot mask annotation on Gatan DigitalMicrograph
Array mask annotation on Gatan DigitalMicrograph			Profile function on Gatan DigitalMicrograph
Text annotation on Gatan DigitalMicrograph			Bandpass mask annotation on Gatan DigitalMicrograph
Wedge mask annotation on Gatan DigitalMicrograph			Rectangle ROI on Gatan DigitalMicrograph
Line ROI on Gatan DigitalMicrograph			Point ROI on Gatan DigitalMicrograph
Oval ROI on Gatan DigitalMicrograph			Loop ROI and Curve ROI on Gatan DigitalMicrograph
Gatan Orius SC200D CCD camera
Gatan Digital Micrograph Scripts
Gatan Imaging Filter (GIF) software package			Functions in Gatan digital micrograph
Reinstallation of Gatan DM on PC connected with TEM system			Scripts of input dialogs and popup windows for DM
TagGroup
Gatan hardware
Gatan/GIF cameras			Shutters in TEM system
Entrance aperture in GIF camera			Slits in EELS spectrometer and GIF camera
Retractable TV-rate camera			Drift tube in GIF system
Quadrupole lens application in GIF system			Octupole lens application in GIF system
Sextupole lens application in GIF/EELS systems			Hole mask/entrance mask in GIF system
Scanning coils in EELS/GIF systems			DigiScan software and hardware
Gatan PIPS (Precision Ion Polishing System)			Gatan Instrumentation Bin (GIB)
No GIF images/spectra			GIF controllers
Contamination of GIF system			GIF gate valve
Pressurized air for EM parts			Pneumatic apertures
Water cooling in EMs			Vacuum of GIF camera chamber
Vacuum of GIF camera chamber			EEL spectra/image shift on camera caused by magnetic objects
Instability of EEL spectra or images due to GIF charging			Gatan MultiScan camera complete KIT
Gatan Bioscan Camera
Gatan hardware and software troubleshooting
Troubleshooting related to GIF software and hardware			Troubleshooting related to DigiScan
Cathodoluminescence system and their troubleshooting
Gate in MOS
Gate in Transistors			Leakage current in gate oxide of MOS
PVC (passive voltage contrast) of gate contacts			Physical gate length
Problems in poly-Si gate in ICs
Gata: Metal gate
Gate oxides			Metal oxides
Thermodynamic stability of metal gate oxides in ICs
Gauge
Pirani gauge			Penning gauge

Gaudefroyite (Ca₄Mn³⁺_2.5(BO₃)₃(CO₃)O_2.25(OH)_0.75)			Gauss' law for magnetism
Gauss' law for electricity			Gaussian optics in EMs
Gaussian distribution
Deviation of Gaussian distribution of defocus due to chromatic aberration			Gaussian distribution of electron beam intensity/probe tail
Distortion/asymmetry of X-ray peak from Gaussian shape in EDS			Shape of X-ray peak in EDS measurements
Gaussian Focus
Minimum (phase-)contrast in (HR)TEM imaging with Gaussian defocus
Gaussian Focus for Core-Loss EFTEM Imaging			Ronchigram at Gaussian focus
Generation
Generation of defects in Crystals
Geometric aberration			Key Geometric, Materials, Thermal, and Electrical Tolerances in SEM
EELS energy resolution limited by geometric aberration			Geometric-aberration free: ideal (first-order) trajectories of electrons
Germanium (Ge)
EDS measurement of germanium			EELS measurement of germanium
Phase diagram of germanium-X			Extinctions and weak spots showing in electron diffraction patterns of germanium
Comparison of various X-ray spectrometers			Lithium drifted & intrinsic germanium EDS detectors
Solid solubility of various impurities in germanium			Ge_xSb_yTe_z (GST)
Ge-based metallic-glass alloys			SiGe/Si system and its defects
Gibbs free energy
Gibbs free energy change due to alloy formation

“Ghost Feature” in 2-D diffractograms			Gjönnes-Moodie (G-M) extinctions/lines in electron diffraction patterns
Glaser’s “Glockenfeld” (bell-shaped field) in EMs			Glide/slip planes and glide/slip directions
Glass
Cooling rate to make metallic glasses from melts			Glass transition of metallic glasses
Glass forming ability (GFA) from melts			Reduced glass transition temperature
Critical casting thickness for formation of metallic glass alloys from melts

Glide dislocation			Glide and dislocation loops
Gold (Au)
EELS measurement of gold (Au)			EDS measurement of gold (Au)
HRTEM and diffraction of gold (Au) particles & single crystals			Special application of gold in EM-related devices
Gold in ICs			Phase diagram of gold-X
Gold nanoparticles			Au-based metallic-glass alloys
Adhesion between gold and other materials

Golden mean/golden ratio and quasicrystals
Goldschmidt tolerance factor			Goniometer stages in TEMs
Grain boundary dissociation and Interfacial reconstruction in polycrystals
9R structure at grain boundaries in FCC materials			BCC structure at grain boundaries in FCC materials
HCP structure at grain boundaries in FCC materials			EELS analysis of grain boundaries
Grain boundary measurements with EBSD
Grain boundary in polycrystalline materials
Crystalline structure of "perfect" grain boundary			Energy of atoms at grain boundaries
<110> tilt twin and grain boundaries in FCC materials			Σ3 grain and twin boundaries in FCC materials
Σ11 grain and twin boundaries in FCC materials			Σ43 grain and twin boundaries in FCC materials
Σ99 grain and twin boundaries in FCC materials			Preferential electron-beam etching of grain boundaries
Diffusion/penetration/diffusivity of elements through grain boundaries			Preferential ion milling at grain boundaries
Grain-boundary grooving mechanism/model			Grain boundary diffusion mechanism of electromigration in interconnects in ICs
Grain boundary strength			Effect of grain boundary on electrical properties
Dangling-bonds in grain boundaries			Measurement of elemental segregation at grain boundaries
Grain growth
Grain growth induced by FIB milling			Crystal growth
Grain orientation
Ionic sputter yield depending on grain orientation			Evaluation of grain orientations based on electron backscattering
Evaluation of grain orientation based on Kikuchi lines/bands			Different TEM techniques for crystalline grains in various sizes
Orientation relationship between two crystals/grains
Grain size
Evaluation of grain size by XRD technique			Grain size dependence of electromigration-induced failures
Grain size/boundary determination by FIB			Broadening of diffraction intensities depending on grain size
Graphene
Analysis of graphene using EMs			Graphite
Graphite as negative electrodes in lithium batteries

Grazing incidence optics			Great circles in Wulff Net
Grease of vacuum seals			Green’s function
Grids
TEM specimen grids for EDS analysis

Groove edges			Gun lens in EMs
Ground-state energy of inner-shell electron			Gun-alignment and its coil control system/gun shift and tilt in EMs
Group theory			Gun axis in EMs