Practical Electron Microscopy and Database

An Online Book, Second Edition by Dr. Yougui Liao (2006)

Practical Electron Microscopy and Database - An Online Book

Table of Contents/Index

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

Salary and job positions for electron microscopists  
Sample for EMs  
Sample requirements for high resolution atomic-number contrast HAADF imaging SEM samples
TEM samples   Carbon supports for EM analysis
Sample stages/holders in EMs and FIB Coating to avoid charging in SEM samples
 Sample-tilt in TEM
Sample-tilt induced effects in TEM Diffraction variation due to TEM sample tilt
Sapphire: Al2O3
Satellites
Main and satellites reflections in electron diffraction patterns Modulation/satellite reflections due to mutually commensurate mismatch
Saturation
Electron gun saturation Binning versus saturation/exposure time in CCD camera
Saturation of CCD camera
Binning versus saturation/exposure time in CCD camera Smearing/blooming in CCD
Streaks formed by smearing/blooming in CCD camera Streaking of diffraction spots due to thin structures in TEM specimens
Saturation of point defects
Savitzky-Golay filter
Scaling
Current density scaling of interconnects in ICs Scaling of CMOS-FET
Scaling in IC designs
Scan speed/dwell time of detectors and cameras in TEM/STEM imaging and elemental mapping
Scandium (Sc) 
Sc2O3
 Scanning of electron bean
Electron-beam scanning/deflecting coil control system in EMs Scanning coils in EELS/GIF systems
 Scanning electron microscopy (SEM)
Comparison between backscattered electron & secondary electron imagings Comparison of TEM and SEM
Key Geometric, Materials, Thermal, and Electrical Tolerances in SEM
Advanced/atomic/high resolution/latest SEMs
Contrast in SEM Images   Charging of electrically isolated materials in SEM
EELS measurements in EMs with low-energy incident electrons Cs correction in SEM
Active voltage contrast (AVC) in FIB and SEM Low-voltage scanning electron microscopy (LVSEM)
Negative charging case of PVC in SEM Passive voltage contrast (PVC) in FIB and SEM
Positive charging case of PVC in FIB and SEM Schematic diagram of SEM systems
SEM observation of structures underneath insulators Virtual objective aperture (VOA) in SEM
Objective lens in SEMs/STEMs   Objective polepieces in EMs
Challenges in in-line SEM inspection on wafers  
Tilt of electron beam in EMs Bias/voltage in SEM for SE and BSE separations
Incoherence/energy spread in SEM imaging SEM spatial resolution affected by accelerating voltage of electron beam
Tomographic properties of SEM and dual-beam techniques Wave function of focused probe in STEM/SEM
X-ray detector & EDS comparison in SEM/TEM/STEM Desktop/portable/tabletop SEM
Dual beam FIB/SEM Manufacturers/companies producing FIB & EM instruments
Cryo-focused ion beam-SEM (FIB-SEM) Effect of hydrocarbon in SEM observation
Dependence of electron probe/beam current on probe size in EMs Development history of SEM technique
SEM: HRSEM/high resolution SEM imaging
Effect of amorphous layer on contrast of high resolution/HRSEM images HRSEM image contrast as function of crystal tilt
SEM resolution affected by delocalization of inelastic scattering  
Working distance in SEM and its effects on image contrast  
 Scanning electron microscopy (SEM) sample and its preparation 
Advantages and disadvantages of FIB technology for EM sample preparations Curtain effect in FIB-EM sample preparation
Voids generated during sample preparation  
Nanoparticles sample Double cross-sections for examination of damage of prepared EM sample surface
Plasma cleaning of FIB prepared specimens Sample preparation for EBSD analysis
"Mixed" inelastic scattering and its EELS
Alignments
Scanning helium ion microscopy (SHIM or HeIM) 
Scanning probe microscopy (SPM) 
Piezoresponse atomic-force microscopy (PFM)
Scanning-tunneling microscope (STM)
Scattering  
Electron scattering within TEM specimen Electron scattering within SEM specimen
Weak scattering in some materials in TEM observations Most possible scattering angle of incident electrons for atomic ionization/energy loss
Dependence of scattering of incident electrons on scattering angle Angular-resolved electron scattering
Scattering potential of crystal Electron atomic scattering factors
X-ray atomic scattering factors X-rays generated by scattered electron: an EDS artifact
Scattering vector/transferred wave vector after electron scattering with matter Schrödinger equation
Scherzer  
Scherzer defocus Scherzer expression/resolution/limit
Scherzer theorem Ronchigram at Gaussian/Scherzer focus
Scherzer phase plate
Optimal objective/Scherzer apertures in CTEM & HRTEM imaging Maximum (phase-)contrast in (HR)TEM imaging (with Scherzer defocus)
Schoenflies notations of point groups Schottky and other barrier heights
Schottky emission electron guns Schottky effect
 Scintillator 
Scintillator-photomultiplier (PM) system  Ce-doped yttrium-aluminum garnet (YAG) 
Electron backscattering from scintillator in EMs Scintillating material
Scintillator-coupled CCD camera
Screw-axis 
Effect of screw axis on electron diffraction patterns
Screw dislocations Screw dislocations versus edge dislocations
Scripts for Gatan Digital Micrograph   Scroll vacuum pumps
Second-order phase transitions
Second-order aberration corrections Secondary electron detector in TEM/STEM
Second order Laue zones (SOLZ)
Standard SOLZ diffraction patterns for various crystal structures
Secondary electrons  
Application of SEs other than electron microscopy  Disadvantages and harm of SE in some cases 
Dependence of emission coefficient of secondary electrons on atomic number and accelerating voltage of incident beam SE1/SE2 ratio (between different types of secondary electrons) affected by energy of primary electron beam
SE emitted from TEM thin film  Escape depth of secondary electrons
Separating BSEs from SEs in SEM Trajectory of secondary electrons
Secondary electron energy spectroscopy Redistribution and redistribution rate of SEs
Kinetic energy of secondary electron EDS signal affected by secondary and backscattered electrons
  Secondary electron detectors in SEM (SEM detectors)
Collection efficiency of secondary electrons in SEM In-lens (immersion lens/through-the lens) SEM detectors
Everhart-Thornley (ET) detector Lateral detectors in SEM
Contrast dependence on detector position Backscattered electron detector
Secondary electron emission (SEE) & generation by incident electrons 
Linearization of voltage contrast in SEM  
SE yield (emission coefficient) in EMs  Dependence of emission coefficient of secondary electrons on Z
Constant-loss approximation on process of secondary electron generation Emission depth of secondary electrons
Mechanisms and processes of secondary electron generation and SE imaging Responding time of SE emission after electron irradiation 
Source of secondary electrons in SEM   Full width at half maximum (FWHM) of emitted SE distribution
Energy & most probable energy (MPE) of secondary electron emission Contrast affected by accelerating voltage in SEM
Secondary electron emission by ion irradiation 
Secondary electron emission from surfaces by ion milling and its angular dependence
Secondary ion mass spectrometry (SIMS) 
Detection limits of SIMS Comparison between various SIMS
Comparison between XPS and various SIMS SIMS application of IC failure analysis
Comparison among TEM, APT, ToF SIMS and ICP-MS
Ionic sputtering yield in FIB & SIMS Lateral ranges of probe ions in FIB and SIMS
Seignette salt/Rochelle salt (NaKC4H4O6•4H2O) Secondary X-ray (fluorescence) in EDS measurements
Sector magnet spectrometer SEE (secondary electron emission)
Seebeck effect imaging (laser) SE3 (third type of secondary electrons) in SEM
Segmental Ronchigram autocorrelation function matrix (SRAM) for aberration correction
 Segregations
Investigation and quantification of elemental segregation at interface Measurement of elemental segregation at grain boundaries
Selected-area electron diffraction (SAED)
Comparison between CBED and SAD (selected area diffraction) Selected area diffraction (SAD) aperture
Indexing SAD (selected area diffraction) patterns
Selenium (Se) 
A1-pCr2Se4-p (A =ˆ Ba, Sr, Eu, Pb) Misfit layer chalcogenides: (AX)1+δ(BX2)n (A =ˆ rare earth/Sn/Pb/Sb/Bi; B =ˆ Ti/V/Cr/Nb/Ta; X =ˆ S/Se)
MgSe ZnSe
CdSe  Cu2ZnSnSe4 
Self-absorption of outgoing X-ray in EDS measurements 
Semiconductors
Semiconductor device performances Compound semiconductor
Nitride semiconductors Semiconductor detectors 
TEM specimen requirements in semiconductor industry International technology roadmap for semiconductors
Schottky barrier heights Properties of semiconductor materials
Etchants used in semiconductor manufacturing Microwave semiconductor devices
Sense vector
Sensitivity in EMs
Sensitivity/minimum detectable mass of EELS  Sensitivity/minimum detectable mass of EDS 
Identification of soft failure and non visible defects in ICs Sensitivity of thermal laser stimulation methods in EFA
Sensors
Electronic optical imaging sensors/Image sensors CMOS Monolithic Active Pixel Sensors (MAPS) direct electron detectors
Separating BSEs from SEs in SEM Serial EELS spectrometer 
Service and sales of EM systems Purchase/buy/sale/service of TEM systems and acceptance specifications of new systems
Sextupole/hexapole    
Seven crystal families
Triclinic crystals Monoclinic crystal systems
Orthorhombic lattices Tetragonal crystal
Trigonal crystals (Rhombohedral crystals) Hexagonal crystal systems
Cubic crystals
Seven crystal families (others)
Matrix of the seven crystal families in real and reciprocal spaces  Symmetry groups for the crystal systems
Interfacial angles of crystals of the seven crystal families Spacing of lattice of the seven crystal families
Shadowing contrast in SEM Shadow image/Ronchigram/microdiffraction pattern/Azimuthal and radial circles in STEM
Shallow trench isolation (STI) failure mechanisms of CMOS
Shape 
Shape of electron diffraction spots Shape memory alloys
Shape of ionization edge/core-loss edge in EELS Shape of X-ray peak in EDS measurements
Sharpen filter in image processing
Sharpness
Topographic contrast (sharpness) depending on beam energy in SEM Topographic contrast (sharpness) affected by the detector position in SEM
Shear stress
Screw dislocation formation due to shear stress
Shifts

Correction of zero-loss shift in EELS  

Chemical shift due to molecule formation
Tilt & shift and their purities/pivot point/rocking point in TEM TEM specimen traverse induced by specimen tilting
Shift of HOLZ patterns relative to ZOLZ patterns Gun-alignment coil control system/gun shift and tilt in EMs
Shift of probe in TEM system when switching different modes Phase shift from defocus and spherical aberration
Probe shift in TEM system when switching between STEM and other modes Shift of electron beam
Electron-beam-tilt-induced image displacement in TEM Electron-beam-tilt-induced coma in TEM
Chemical shift detection of elements by EDS Peak position shift in EDS
EEL spectra/image shift on camera caused by magnetic objects Chemical shift detection of elements by EELS and EFTEM
Shipping
IC failure induced during wafer packaging and shipping
Short circuit failure in ICs
Thermodynamic stability of metal gate oxides in ICs Short circuit failure due to electromigration
Short failure in IC devices detected by passive voltage contrast (PVC)
Short range ordering (SRO) in materials
Analysis of short-range properties of materials Icosahedral short-range ordering
Study of short range order (SRO) by EXELFS HRTEM images of atomic short-range ordering in crystals
TEM sample preparation for atomic short-range ordering analysis Free volume in metallic glasses
Sample preparation for tomography in TEM  
TEM analysis of short range ordering in amorphous materials fcc-type packing short range ordering of metallic glass
Short-range-orderings dependence on coordination number in metallic glasses bcc-type packing short range ordering of metallic glasses
bct-type packing short range ordering of metallic glasses Pair Distribution Function (PDF) analysis
Shoulder structure in EELS profiles
Shuffle transformation
Shutters in TEM system 
Electrostatic shutter in EMs Shutter used in EELS and EFTEM measurements
Side-entry and top-entry lens in TEM systems   Side-entry goniometer stages/holders in TEMs/STEMs
Side wall in integrated circuits (IC) Sidewall implantation in TEM sample preparation with FIB
Sigma (σ) bond
Signals 
Signal-to-noise ratio increased by binning in CCD cameras Signal-to-noise ratio (SNR) in the EELS spectrum  
Dependence of signal types on sample thickness in EMs Signal-to-noise ratio in TEM/STEM images
 Silicon (Si)
EDS/x-rays of silicon (Si) EELS measurement of silicon
(HAADF) STEM images of silicon (Si) Single crystalline silicon
Polycrystalline silicon Amorphous silicon
Atomic-number contrast of silicon ions in ADF-STEM images Silicon (Si) alloying anodes in lithium batteries
Diffraction patterns & crystallography of silicon (Si) Silicon oils from diffusion pump
EM analysis of silicon Solid solubility of various impurities in silicon
Stacking faults, twins and dislocations in silicon Si-X phase diagrams
Extinctions and weak spots showing in electron diffraction patterns of silicon Doped crystalline and amorphous Si (e.g. arsenic, boron, phosphorus doped)
Lithium-drifted silicon diodes & Si(Li) EDS detectors Ionization energy/dopant energy levels of impurities in Si
Silicon nitride (SiNx) support/container for EM analysis Thermal oxidation of silicon
Silicon/nitrogen implantation application to suppress IC failure Silicon dust contamination in IC devices
Ammonium fluorosilicate [(NH4)2SiF6] Si Kikuchi pattern & strain measurement  
Local oxidation of silicon (LOCOS) Si-based metallic-glass alloys
Silicon drift EDS detectors
Comparison of various X-ray spectrometers Development history of silicon drift detectors
Silicides, silicon-related materials, silicidation  Silicide stringers
SiGe and SiGe/Si system & its defects WSix
Silicide stringers  
TaSiNx Polycrystalline silicon in solar cells
SiC (silicon carbide): 6H-, 4H- and 3C-(β-)SiC Electron microscopy analysis of SiC (silicon carbide) materials
EM sample preparation of SiC (Silicon Carbide) materials   
Silicide processes  
Copper (Cu) with dielectric diffusion barrier SiCxNy TiSix
Cu/TiN/TiSi2/Si contacts  PtSi in ICs
HfSiO4 Copper silicide
Silicon nitride (Si3N4 & SixNy) Cobalt disilicide (CoSi2) and cobalt silicide (CoSi)
Ca3Al2Si3O12 Nickel silicide (Ni2Si/NiSi/NiSi2)
SiSn
Silicides' properties
Electrical properties of silicides Mechanical properties of silicides
Optical properties of silicides Thermal properties of silicides
Chemical properties of silicides Stress distribution around silicides
Structures of silicides
Silicon dioxide/silica glass (SiO2)
Silicon dioxide/quartz/SiO2 analysis by EM-related techniques SiO2 application in ICs
SEM observation related to SiO2
Silver (Ag)
EDS measurement of silver (Ag) EELS measurement of silver (Ag)
Sputtering/etching of silver from electron irradiation in EMs
Silver in ICs Phase diagram of silver-X
Ag-based metallic-glass alloys
SIMS (secondary ion mass spectrometry) Simple cubic crystals
Simulation/modeling 
Models for simulation in EM techniques
Simulation of electron optics EM image simulations at high spatial resolutions
Software and program examples for EM-related simulation and analysis  Stobbs factor in TEM imaging 
iFast (Integrated Fast Automation Software Technology)  
Simulation of ADF(HAADF)-STEM images Lenz model for elastic scattering distribution simulation
Four-dimensional scanning transmission electron microscopy (4D STEM) Four-dimensional (4D) STEM-diffraction
Simulation: TEM modeling
Multislice simulation (MS) of TEM images Bloch wave approaches for simulating TEM images
Simultaneous EELS and EDS acquisition
Single atom  
Single atom detection of EELS Energy level diagrams for single atoms, dimers, clusters & bulk materials
Single scattering of electrons/single-electron excitation 
Single scattering distribution (SSD) & EELS deconvolution
Slits in EELS spectrometer and energy filters 
Spatial resolution of EFTEM mapping affected by energy range
Single particle analysis in TEM tomography
Six-fold axis in crystals Sixfold symmetries in EMs
Size
Dimension/size of EMs Size of EDS detector in EMs
Size of aperture Dependence of electron probe/beam current on probe size in EMs
Slip/glide planes and slip/glide directions Slow scan charge-coupled device (SSCCD) camera
Small circles in Wulff Net Small electron source
Smallest structures obtained by dual beam SEM/FIB/STEM deposition Smearing/blooming in CCD
Smoothing filters Snorkel objective lens in some SEM systems
Sodium (Na)
NaCl & sodium chloride structures
NaNbO3 Seignette salt/Rochelle salt (NaKC4H4O6•4H2O)
Sobel edge filter (operator) Soft failure: Identification of soft failure and non visible defects in ICs
Soft collision between charged particle and atom Soft X-rays
Software
Software for EDS spectrum acquisition and analysis NSS EDS software
Software for video recording on EMs Software programs for TEM holography
Solar cells
Polycrystalline silicon in solar cells Best research-cell efficiencies for solar cells
Solenoids 
 Solid angle
Angular distribution/emission angle of secondary electron in SEM Solid angle of electron source (in electron gun) 
Solid angle of secondary electron detection in SEM Collection angle/solid angle of EDS detector
Distance effect on solid angle of EDS detector
Solid Oxide Fuel Cells (SOFCs)
Materials for solid oxide fuel cells (SOFCs) Carbon deposition/contamination in SOFCs
Solid immersion lens in thermal laser stimulation techniques
Source of backscattering electrons in SEM
Solid state detectors (SSDs) for EDS Source of secondary electrons in SEM  
Solubility
Nitrogen solubility in materials Solid solubility of various impurities in silicon
Solid solubility of various impurities in germanium Solid solubility of various impurities in carbon/diamond
sp2 hybridization sp3 hybridization
 Space-charge
Space-charge effect in electron beam Spacecraft charging
Space group: Introduction
Crystallographic space group notations/description
Unit cell Centering translations
Point group Translational symmetries
Determination of space group Patterson space group
d-spacing ratios of allowed Bragg reflections for some space groups Space group/crystal structure depending on substitution concentration
Crystal structure & space group of compounds Centrosymmetric space groups
Non-centrosymmetric space groups Chiral space groups
Equivocal space groups Unequivocal space groups
230 space groups in seven crystal families
A-centered lattices/A-centering & its space groups (only one crystal family)
Orthorhombic
38: C2v14: Amm2, Am2m, Anc21, Bmm2, B2mm, Cm2m, C2mm 39: C2v15: Abm2, Ab2m, Acc21, Bma2, B2am, Cm2a, C2ma, C2mb
40: C2v16: Ama2, Am2a, Ann21, Bbm2, B2mb, Cc2m, C2cm 41: C2v17: Aba2, Ab2a, Acn21, Ac2a, Bba2, B2ab, Cc2a, Cc2b, C2ca, C2cb
36: A21am, Cmc21, A21ma, Bb21m, Bm21b, Cbn21, Ccm21
C-centered lattices/C-centering & their space groups (only two crystal families)
Monoclinic
5: C23: C2, A112, A2, B112, F2, I2, I21 8: Cs3: Cm, Am, Im
9: Cs4: Cc, Aa, An, A11a, B11b, Cn, Fd11, Ia, Ic 12: C2h3: C2/m, A112/m, A2/m, B112/m, C2/a, C2/m11, F2/m, I112/m, I2/m
15: C2h6: A2/a, C2/c , A112/a, A2/n, B1121/b, B112/b, B112/n, C2/c11, C2/n, F2/d, I112/a, I112/b, I2/a, I2/c, I2/n, I21/a, I21/c
Orthorhombic
20: D25: C2221, A2122, B2212, C212121 21: D26: C222, A222, B222, C21212
35: C2v11: Cmm2, A2mm, Bm2m, Cba2 36: C2v12: Cmc21, A21am
37: C2v13: Ccc2, A2aa, Bb2b, Cnn2 63: D2h17: Cmcm, Amam, Amma, Bbmm, Bmmb, Cbnn, Ccmm
64: D2h18: Cmca, Abma, Bmab, Abam, Acam, Bbam, Bbcm, Cbnb, Ccma, Ccmb 65: D2h19: Cmmm, Ammm, Bmmm, Cban
66: D2h20: Cccm, Amaa, Bbmb, Cnnn 67: D2h21: Cmma, Abmm, Bmam, Cbab
68: D2h22: Ccca, Abaa, Bbab, Cnnb
F-centered lattices/F-centering & their space groups (only two crystal families)
Orthorhombic
22: D27: F222, F212121 42: C2v18: Fmm2, Fbc21, Fca21, Fm2m, Fnn2, F2mm
43: C2v19: Fdd2, Fdd21, Fd2d, F2dd 69: D2h23: Fmmm, Fbca, Fcab, Fnnn
70: D2h24: Fddd
Cubic
196: T2: F23 202: Th3: Fm-3, Fm3
203: Th4: Fd-3, Fd3 209: O3: F432
210: O4: F4132 216: Td2: F4-3m, F-43m
219: Td5: F-43c 225: Oh5: Fm-3m, Fm3m
226: Oh6: Fm-3c, Fm3c 227: Oh7: Fd-3m, Fd3m
228: Oh8: Fd-3c, Fd3c
I (body-centered) lattices/I-centering & their space groups (only three crystal families)
Orthorhombic
23: D28: I222 24: D29: I212121
44: C2v20: Imm2, Im2m, Inn21, I2mm 45: C2v21: Iba2, Ib2a, Icc21, Ic2a, I2aa, I2cb
46: C2v22: Ima2, Ibm2, Ib2m, Im2a, Inc21, I2am, I2cm, I2ma, Pn2a 71: D2h25: Immm, Innn
72: D2h26: Ibam, Ibma, Iccn, Imaa, Imcb 73: D2h27: Ibca, Icab
74: D2h28: Imma, Ibmm, Imam, Imcm, Innb
Tetragonal
79: C45: I4 80: C46: I41
82: S42: I-4 87: C4h5: I4/m
88: C4h6: I41/a 97: D49: I422
98: D410: I4122 107: C4v9: I4mm
108: C4v10: I4cm 109: C4v11: I41md
110: C4v12: I41cd 119: D2d9: I-4m2
120: D2d10: I-4c2 121: D2d11: I-42m
122: D2d12: I-42d 139: D4h17: I4/mmm
140: D4h18: I4/mcm 141: D4h19: I41/amd
142: D4h20: I41/acd
Cubic
197: T3: I23 199: T5: I213
204: Th5: Im-3, Im3 206: Th7: Ia-3, Ia3
211: O5: I432 214: O8: I4132
217: Td3: I-43m 220: Td6: I-43d
229: Oh9: Im-3m, Im3m 230: Oh10: Ia-3d, Ia3d
P (primitive) lattices & their space groups (all the seven crystal families)
Triclinic
1 : C11: P1, C1, I1 2: Ci1: P-1, A-1, B-1, C-1, F-1, I-1
Monoclinic
3: C21: P2, P112 4: C22: P21, B21, C1121, P1121, P2111
6: Cs1: Pm 7: Cs2: Pc, Bd, C11a, Pa, Pn, P11b, P11n
10: C2h1: P2/m 11: C2h2: P21/m, B21/m, P1121/m
13: C2h4: P2/c, C112/b, P112/a, P112/b, P112/n, P2/a, P2/c11, P2/n 14: C2h5: P21/c, B21/a, B21/c, B21/d, P1121/a, P1121/b, P1121/n, P21/a, P21/b11, P21/c11, P21/n, P21/n11
Orthorhombic
16: D21: P222 17: D22: P2221, P2122, P2212
18: D23: P21212, P21221, P22121 19: D24: P212121
25: C2v1: Pmm2, Pm2m, P2mm 26: C2v2: Pmc21, Pb21m, Pcm21, Pm21b, P21am, P21ma
27: C2v3: Pcc2, Pb2b, P2aa 28: C2v4: Pma2, Pbm2, Pc2m, Pm2a, P2cm, P2mb
29: C2v5: Pca21, Pbc21, P21ab, Pb21a, Pc21b, P21ca 30: C2v6: Pnc2, Pb2n, Pcn2, Pn2b, P2an, P2na
31: C2v7: Pmn21, Pm21n, Pnm21, Pn21m, P21mn, P21nm 32: C2v8: Pba2, Pc2a, P2cb
33: C2v9: Pna21, P21cn, Pbn21, Pc21n, Pn21a, P21nb 34: C2v10: Pnn2, Pn2n, P2nn
47: D2h1: Pmmm 48: D2h2: Pnnn
49: D2h3: Pccm, Pbmb, Pmaa 50: D2h4: Pban, Pcna, Pncb
51: D2h5: Pmma, Pbmm, Pcmm, Pmam, Pmcm, Pmmb 52: D2h6: Pnna, Pbnn, Pcnn, Pnan, Pncn, Pnnb
53: D2h7: Pmna, Pbmn, Pcnm, Pman, Pncm, Pnmb 54: D2h8: Pcca, Pbaa, Pbab, Pbcb, Pcaa, Pccb
55: D2h9: Pbam, Pcma, Pmcb 56: D2h10: Pccn, Pbnb, Pnaa
57: D2h11: Pbcm, Pbma, Pcam, Pcmb, Pmab, Pmca 58: D2h12: Pnnm, Pmnn, Pnmn
59: D2h13: Pmmn, Pmnm, Pnmm 60: D2h14: Pbcn, Pbna, Pcan, Pcnb, Pnab, Pnca
61: D2h15: Pbca, Pcab 62: D2h16: Pnma, Pbnm, Pcmn, Pmcn, Pmnb, Pnam
Tetragonal
75: C41: P4 76: C42: P41
77: C43: P42 78: C44: P43
81: S41: P-4 83: C4h1: P4/m
84: C4h2: P42/m 85: C4h3: P4/n
86: C4h4: P42/n 89: D41: P422
90: D42: P4212 91: D43: P4122
92: D44: P41212, C41221 93: D45: P4222
94: D46: P42212 95: D47: P4322
96: D48: P43212 99: C4v1: P4mm
100: C4v2: P4bm 101: C4v3: P42cm
102: C4v4: P42nm 103: C4v5: P4cc
104: C4v6: P4nc 105: C4v7: P42mc
106: C4v8: P42bc 111: D2d1: P-42m
112: D2d2: P-42c 113: D2d3: P-421m
114: D2d4: P-421c 115: D2d5: P-4m2
116: D2d6: P-4c2 117: D2d7: P-4b2
118: D2d8: P-4n2 123: D4h1: P4/mmm
124: D4h2: P4/mcc 125: D4h3: P4/nbm
126: D4h4: P4/nnc 127: D4h5: P4/mbm, C4/mmb
128: D4h6: P4/mnc 129: D4h7: P4/nmm
130: D4h8: P4/ncc 131: D4h9: P42/mmc
132: D4h10: P42/mcm 133: D4h11: P42/nbc
134: D4h12: P42/nnm 135: D4h13: P42/mbc
136: D4h14: P42/mnm 137: D4h15: P42/nmc
138: D4h16: P42/ncm
Trigonal
143: C31: P3 144: C32: P31
145: C33: P32 147: C3i1: P-3
149: D31: P312 150: D32: P321
151: D33: P3112 152: D34: P3121
153: D35: P3212 154: D36: P3221
156: C3v1: P3m1 157: C3v2: P31m
158: C3v3: P3c1 159: C3v4: P31c
162: D3d1: P-31m 163: D3d2: P-31c
164: D3d3: P-3m1 165: D3d4: P-3c1
Hexagonal
168: C61: P6 169: C62: P61
170: C63: P65 171: C64: P62
172: C65: P64 173: C66: P63
174: C3h1: P-6 175: C6h1: P6/m
176: C6h2: P63/m 177: D61: P622
178: D62: P6122 179: D63: P6522
180: D64: P6222 181: D65: P6422
182: D66: P6322 183: C6v1: P6mm
184: C6v2: P6cc 185: C6v3: P63cm
186: C6v4: P63mc 187: D3h1: P-6m2
188: D3h2: P-6c2 189: D3h3: P-62m
190: D3h4: P-62c 191: D6h1: P6/mmm
192: D6h2: P6/mcc 193: D6h3: P63/mcm
194: D6h4: P63/mmc P6m2
Cubic
195: T1: P23 198: T4: P213
200: Th1: Pm-3 201: Th2: Pn-3
205: Th6: Pa-3, Pa3, Pb3 207: O1: P432
208: O2: P4232 212: O6: P4332
213: O7: P4132 215: Td1: P-43m
218: Td4: P-43n 221: Oh1: Pm-3m
222: Oh2: Pn-3n 223: Oh3: Pm-3n
224: Oh4: Pn-3m
R-centered lattices/R-centering & its space groups (only one crystal family)
Trigonal
146: C34: R3, R3r 148: C3i2: R-3, R-3r
155: D37: R32, R32r 160: C3v5: R3m, R3mr
161: C3v6: R3c, R3cr 166: D3d5: R-3m, R-3mr
167: D3d6: R-3c, R-3cr
Others
P105/mmc Pm-35
Fm-35
Space groups that have not been completely determined
Spacers in MOSFET structures
Spacing
Reciprocal lattice spacings Real crystal spacings
Spacing of lattice of the seven crystal families
Spatial coherence/incoherence in EMs
Spatial coherence/incoherence of electron source Contribution of partial spatial coherence to diffractograms
Spatial coherence envelopes
 Spatial frequency/spatial object frequency in EM imaging
Spatial frequency and its band in TEM imaging Spatial frequencies in STEM imaging
Spatial drift & its correction in EFTEM imagings EEL spectrum energy (and zero-loss) drifts/shifts
Spatial resolution 
EDS spatial resolution depending on EM sample thickness EELS spatial resolution depending on specimen thickness
Spatial resolution of camera 
Rayleigh criterion Spatial resolution of EELS and EFTEM measurements
Spatial resolutions between various techniques Spatial resolution of EELS in STEM mode
Spatial resolution of inelastic signals Resolution in electron tomography
Resolution of cathodoluminescence technique Degradation of EELS spatial resolution due to specimen drift
Spatial resolution of electron microscopes
Diffractogram vs spatial resolution Spatial resolution of EFTEM
Point resolution in EMs Effect of chromatic aberration on spatial resolution in EMs
Spatial resolution of SEM Spatial resolution of microscopes
Spatial resolution for light microscopes Spatial resolution in EDS technique
Spatial resolution of STEM Evaluation of spatial resolution in EMs
Corrections of Spatial Drift between Successive Acquisitions in 4D STEM Measurements  
EM sample thickness dependence of spatial resolution Methods for improving spatial resolution in EMs
Spatial resolution improved by increasing accelerating voltage in EMs EM image simulations at high spatial resolutions
Spatial resolutions limited by specimen drifts Spatial resolution of EFTEM mapping affected by chromatic aberration
Spatial resolution of EFTEM mapping affected by energy range Spatial resolution of EFTEM mapping affected by collection angle
Spatial resolution of EBSD Spatial resolution/beam spreading in STEM depending on convergence semiangle
Spatial resolution/resolving power affected by beam alignments Spatial resolution affected by objective astigmatism
Effects of illumination coherence on spatial resolution in TEMs Resolution of FIB milling
Spatial resolution in CBED measurements
Spatial resolution limits of EMs
Spatial resolution limit affected by aberrations Scherzer expression/resolution/limit
Factors limiting spatial resolution on TEM Resolution limit due to spherical aberration (Cs)
Resolution limit due to chromatic aberration (Cc) Resolution limit of electron microscopes
Surpassing the resolution limit of EMs Abbe's equation: resolution limit of microscopes
 Spatial Resolution of TEM/HRTEM
Determination of TEM spatial resolution Effect of configuration of objective polepieces on STEM/TEM spatial resolution
Methods for improving spatial resolution in EMs Spatial resolution improved by increasing accelerating voltage in EMs
Spatial resolution of TEM measured by Young’s fringe Improvement of spatial resolution using aberration correction in EMs
TEM spatial resolution improved by defocus series Improvement of TEM spatial resolution by image series reconstructions
EM image simulations at high spatial resolutions Spatial resolution of electron holography
Spatially resolved EELS (SREELS) Specific heat and heat capacity of materials
Specifications of EMs
Examples of FIB specifications
Specimen drift in TEM observations 
Spatial drift correction in EFTEM imagings
Spectrum-imaging (SI) based on EELS by STEM Spectroscopic amplifier in EDS system
Spectrometers 
Comparison of electron optics of various filters & spectrometers Serial EELS spectrometer 
In-column energy filters & spectrometers Post-column energy filters & spectrometers
SIMS (secondary ion mass spectrometry) Periodic table for EDS and EELS analysis
Speed considerations in EM analyses Speed and time related to electron microscopy and materials
Spherical aberration
Spherical aberration depending on working distance in SEM Resolution limit due to spherical aberration (Cs)
Spherical aberration coefficient (Cs) Benefit of low spherical aberration of objective lens
Determination of the spherical aberration and its coefficients Phase shift from defocus and spherical aberration
Dependence of Cs and Cc aberrations on accelerating voltage of beam Negative spherical aberrations
Longitudinal spherical aberration Transverse spherical aberration
Spherical aberration affected by beam alignments Spherical aberration in STEM
Spatial resolution of EFTEM mapping affected by spherical aberration Spherical aberration rings in Ronchigram
 Spherical aberration corrections
Cs correction in SEM Cs correction in TEM
Probe-forming Cs-corrector in STEM Image-forming Cs-corrector
Interaction between chromatic and spherical aberration corrections Ronchigram comparison between Cs-corrected and uncorrected STEM conditions
Third-order spherical aberration correction  Coupling between aberration corrector and objective lens
Spherical aberration corrector 
Multipole design for Cs correctors in EMs Hexapole/sextupole/dodecapole design for Cs corrector in EMs
Dipole design for Cs corrector in EMs Quadrupole design for Cs corrector in EMs
Octupole design for Cs corrector in EMs
Spin 
Melt-spinning
Spinel (MgAl2O4) structures
Spherical projection Spiking/bridging failure in ICs
Splitting 
Phase-induced splitting of reflections in electron diffraction patterns Splitting of HOLZ lines in CBED patterns
Spontaneous polarization in ferroelectrics 
Direction of spontaneous polarization in ferroelectrics Polarization in ferroelectrics measured by CBED in STEM mode
 Spot size of electron beam
Evaluation of probe size in EMs Dependence of electron probe/beam current on probe size in EMs
Spot size and shape limited by aberrations
Spray & beam defining apertures in FIB Spot mask annotation on Gatan DigitalMicrograph
Spread of the kinetic electron energy  Spreading
Sputter ion pump (SIP)
 Spurious
Spurious/artifacts x-rays in EDS measurements Inaccuracy/artifacts in electron diffraction and spurious intensities
 Sputtering
Evaluation of sputtering cross section Dependence of ionic sputtering on ionic energy
Ionic sputtering in FIB Sputtering/etching threshold energies by energetic electron & ion beams
Introduction of ionic sputtering yields (in FIB & SIMS)
Sputtering damage in EMs
Sputtering & its yield of materials in electron microscopes Preferential electron-beam etching of grain boundaries
Coating of TEM specimen to reduce beam damage & sputtering Cross-sections of surface sputtering/knock-on induced by electron irradiation (sputtering cross section)
Sputtering/knock-on of atoms from beam-exit surface of TEM sample Atom loss during EM measurements
Square
Square symmetry in electron diffraction patterns
Stability
Energy stability of EELS Electrical stability of EM systems
Instability in accelerating voltage of electron beam Instability of TEM imaging due to specimen charging
Stability of ferroelectrics related to oxygen vacancies
Stacking fault
TEM imaging of stacking faults Stacking fault energy of crystals
Determination of displacement vector of stacking fault Visibility/contrast of dislocations and stacking faults in TEM and EMs
Stacking faults, twins and dislocations in silicon
Stacking fault energy of crystals Standard deviation of the Gaussian distribution of defocus due to the chromatic aberration
Standard focus/Eucentric height versus sample tilt in TEM Standby power for mobile devices
Staining/dopant-selective etching in IC analysis Staining in analysis of biological materials
Static dielectric constants
Static random-access memory (SRAM)
Failure of static random-access memory (SRAM)
Steels
 STEM (scanning transmission electron microscope) system  
Four-dimensional (4D) STEM-EELS Practical beam current of STEM technique in TEM
Analytical electron microscopy (STEM/TEM)  Examples of SEM/STEM systems
Imaging geometries of TEM and STEM systems Tilt HAAD STEM tomography
Three-dimensional sectioning of specimens using STEM X-ray detector & EDS comparison in SEM/TEM/STEM
Defect analysis by TEM/STEM Interface analysis by TEM/STEM
Low dose TEM/STEM imaging Examples of TEM/STEM systems
STEM mode
Aberration and its correction in STEM mode Cs correction in STEM
Comparison between CTEM and STEM Spherical aberration in STEM
Beam spreading in STEM caused by chromatic aberration Astigmatism in STEMs
Virtual objective aperture (VOA) in TEM/STEM Objective lens in SEMs/STEMs  
Optimal convergence semi-angle in STEM Measurements of convergence semi-angle in STEM and CBED
Spatial resolution/beam spreading in STEM depending on convergence semiangle Dependence of electron probe/beam current on probe size in EMs
Probe shift in TEM system when switching between STEM and other modes Maximum usable illumination angle in STEM
STEM alignment with Ronchigram STEM imaging affected by accelerating voltage of electron beam
Annular dark-field (ADF) scanning transmission electron microscopy (STEM) Low-angle annular dark field (LAADF) STEM
Defocus series in STEM imaging STEM/TEM imaging with incoherent electrons
Phase shift of electrons depending on scattering angle in TEM/STEM Electronic noise in TEM/STEM/SEM/EELS/EDS systems
Image localization in STEM Minimum attainable probe size in STEM
Theoretical interpretation of STEM/TEM images about crystalline defects Theoretical interpretation of STEM/TEM images about crystalline surface
In Situ TEM/STEM In Situ liquid TEM/STEM analysis
In situ FIB lift-out TEM sample preparation  
Liquid TEM and STEM stage and holder Polarization in ferroelectrics measured by CBED in STEM mode
STEM: Wavefunction & intensity
Contrast transfer function (CTF) in STEM Sensitivity of STEM contrast to focus
Purity of Z-contrast in HAADF-STEM (removing diffraction contrast) Intensity/signal comparison between STEM and CTEM
Simulation of HAADF-STEM images Wavefunction of focused probe in STEM/SEM
Wavefunction affected by aberrations in STEM Exit wavefunction & intensity from STEM specimen
STEM: HRSTEM/high resolution STEM
Artifacts in HRSTEM imaging Effects of amorphous layer and specimen thickness on high resolution STEM images
HRSTEM image contrast as function of crystal tilt HRSTEM image contrast as function of defocus
STEM operation/acquisition of STEM images
Spectrum-imaging (SI) by STEM Scan speed/dwell time of detectors and cameras in TEM/STEM imaging and elemental mapping
Objective/probe-forming aperture for STEM imaging Wobbler for high tension in TEM/STEM
Streaking/noise artifact in TEM/STEM images Wobbler for condenser lens excitation in TEM/STEM
General thickness requirements of TEM samples for EELS/EFTEM/STEM
STEM image contrast
Contrast reversal of bright field TEM/STEM images Contrast analysis of HAADF-STEM images
HRSTEM image contrast as function of crystal tilt HRSTEM image contrast as function of defocus
Dependence of BF/ADF-STEM intensity on specimen thickness Atomic contrast (Z-contrast) by HAADF
ADF(HAADF)-STEM contrast at interfaces Contrast reversal in HAADF imaging
Contrast & intensity in annular dark field (ADF) STEM images
Fraction of electrons scattered onto an ADF detector
STEM data analysis
Removal of sample thickness variations in STEM data analysis Noise in STEM imaging
Comparison between TEM and STEM bright field imagings Drawback/disadvantage of STEM imaging
 Stereographic projection/stereogram
Electron stereographic projection/stereogram for crystals Relationship between electron diffraction patterns and stereographic projections
Wulff net Polar net
Stereographic projection for cubic crystals Angle between two planes/plane normals/poles measured by Wulff net
Pole (plane normal) in electron stereographic projection
Stigmators/astigmatism   Sticking coefficient
Stock: EM companies in stock markets Stobbs factor in TEM imaging
 Stopping power
Electron stopping power Collision (ionization) stopping power
Mass stopping power Radiative stopping power
 Stopper
Beam stopper in TEM
Storage 
Optical storage
Stress/strain & misfit strain
Void formation by Nabarro–Herring creep Stress distribution around silicides
Electrons/holes mobility & current versus strain in materials Strain in ferroelectric materials
Stress/strain fields at interfaces
Strain/stress measurements at micro/nano-scales
Strain/stress analysis with STEM Strain/stress analysis with HR-(S)TEM
Strain/stress measurement using electron diffraction Strain/stress analysis using CBED
Strain measurement with (scanning) nanobeam diffraction ((Scanning)-NBD) Determination of lattice parameters/strain by plasmon EELS
Strain analysis using electron holography Strain/stress analysis using EBSD
TEM/STEM holders for strain analysis Stress-redistribution-induced film bending due to FIB irradiation
Stray radiation in EMs Stray aperture in EMs
Stray magnetic field 
Fluctuation of stray magnetic fields
Streaking
Streaking artifacts in EELS images or profiles Streak imaging technique in EELS measurements
Streaks formed by smearing/blooming in CCD camera Streaking artefacts in FFTs of TEM images
Streaks in electron diffraction patterns Diffuse scattering in electron diffraction due to crystalline disorder
Incoherent thermal diffuse scattering (TDS) electrons in (S)TEM  
Streaking artifacts in TIVA and OBIRCH images Streaking/noise artifact in TEM/STEM images
Strength 
Strength of lenses in EMs   Strength of diatomic bond/bond energy
Grain boundary strength
Strip width in integrated circuits (IC)
Strontium
EDS measurement of strontium (Sr)
Doped and undoped strontium titanate (SrTiO3 ) Superlattice of SrTiO3 and LaTiO3
SrZrO3 Ca1-xSrxTiO3
Atomic-number contrast of Sr ions Sr1-pCr2X4-p (X = ˆS, Se)
Stroboscopic scanning electron microscopy (SEM)
 Structure
Table of structural properties of materials Structure factor and HRTEM
Structure Factor Fhkl Structure function and structure factor
Strukturbericht  
States  
Delocalized states in materials  State: Oxidation states (oxidation number, degree of oxidation) in periodic table
Substitution  
Space group/crystal structure depending on substitution concentration
Substrate
Selection of substrate direction for ICs
Sum peaks in x-ray/EDS profiles
Sulfur (S) 
EDS/WDS measurements of sulfur (S)
La1.2CrS3.2 ZnSSe-based/GaAs heterostructures
A1-pCr2S4-p (A =ˆ Ba, Sr, Eu, Pb) Misfit layer chalcogenides: (AX)1+δ(BX2)n (A =ˆ rare earth/Sn/Pb/Sb/Bi; B =ˆ Ti/V/Cr/Nb/Ta; X =ˆ S/Se)
SF6 and its application in EMs
 Surface
Energy of atoms at surface Difference of atomic structure between surface, interface, and bulk
Surface plasmons formed in thin specimen in EMs Surface reconstruction
Surface & bulk plasmon energy in EELS (table) EELS detection of molecularly adsorbed species on surfaces
Surface & bulk plasmon energy in EELS (theory) Theoretical interpretation of STEM/TEM images about crystalline surface
Number of atoms at surface of and in nanoparticles Surface energies of solids
Diffusion/diffusivity of elements through surfaces (Maximum) escape depth of secondary electrons and its surface sensitivity
Surface potential 
Surface potential at sample surface induced by electron irradiation (e.g. in SEM)
Supercells and subcells of crystals
Superconductor 
Superconducting lens for EMs Properties of superconductive materials
Superlattices
Superlattice of SrTiO3 and LaTiO3 Twofold superstructure
Weak spots related to superstructures in electron diffractions
Super pixel/binning/binned pixel in CCD Suppressor (of beam) in FIB
Switching valves Symmetric immersion lens as objective lens in SEM systems
Synchrotron X-ray Diffraction
Symmetry operations and symmetry elements
Symmetry groups for the crystal systems
Rotation axis (1, 2, 3, 4 and 6 (Cn)) in crystallography
Determination of crystal symmetry CBED pattern symmetries for crystal determination
2mm symmetry 4mm symmetry in electron diffraction patterns
8mm symmetry 12mm symmetry
Center of inversion (center of symmetry, i)
Non-centrosymmetric space groups Centrosymmetric space groups
Symmetry: Three symmetry elements for point group definition
Mirror planes (m, σ) in crystallography Rotation axis (1, 2, 3, 4 and 6 (Cn)) in crystallography
Rotoinversion axis (-4, S4) in crystallography