Table of Contents/Index
Chapter/Index:
Introduction
|
A
|
B
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C
|
D
|
E
|
F
|
G
|
H
|
I
|
J
|
K
|
L
|
M
|
N
|
O
|
P
|
Q
|
R
|
S
|
T
|
U
|
V
|
W
|
X
|
Y
|
Z
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Appendix
Chapter T
t
2g
& e
g
symmetries/states
Tags on Gatan Digital Micrograph
Tabletop/desktop/portable SEM
Take-off angle in EDS system
Taylor and Maclaurin series
Taylor cone
Tantalum (Ta)
EDS measurement of tantalum (Ta)
Ta
2
O
5
TaSiN
x
TaSi
x
TaN
Misfit layer chalcogenides: (AX)
1+δ
(BX
2
)
n
(A = rare earth/Sn/Pb/Sb/Bi; B = Ti/V/Cr/Nb/Ta; X = S/Se)
Techniques for material characterizations
Techniques in electron microscopes
Techniques for dopant profiling in semiconductors
Analysis techniques for ferroelectric materials
Spatial resolutions between various techniques
Techniques of physical failure analysis (PFA) for ICs
Techniques used to detect/measure charges in EM samples
Techniques for silicides' analysis
Television (TV) camera for EMs
Tellurium (Te)
EELS of tellurium (Te)
Ge
x
Sb
y
Te
z
(GST)
Te-X phase diagrams
Te-based metallic-glass alloys
TEM/Conventional TEM (CTEM)
Comparison between CTEM and STEM
Comparison of TEM and SEM
Comparison among TEM, APT, ToF SIMS and ICP-MS
Applications of TEM-related techniques
Defocus in TEM imaging
EELS and quantitative analysis in TEM imaging mode
Instability of TEM imaging due to specimen charging
Hybrid TEMs
Schematic diagram of TEM systems
Aberration correction in CTEM
C
s
corrector in TEM
Position of parts in TEM system
Phonon effect on TEM imaging
Imaging geometries of TEM and STEM systems
Wavefunction affected by aberrations in CTEM
Underfocusing objective lens in TEMs
Image shift/drift in TEM
Intensity/signal comparison between STEM and CTEM
Virtual objective aperture (VOA) in TEM/STEM
Probe shift in TEM system when switching between TEM and other modes
TEM experimental determination of lattice parameters
TEM image processing and deconvolution
History of TEM
Interpretation of TEM/STEM Images
Diffraction contrast in TEM images
Ultrahigh voltage TEMs
Optimized low voltage EMs for high performances
Caustic image in TEM
Diffraction pattern formed in imaging condition/image plane/objective plane
Electron-beam-tilt-induced image displacement in TEM
Electron-beam-tilt-induced coma in TEM
Contrast transfer function (CTF, Phase CTF, or PCTF)
STEM/TEM imaging with incoherent electrons
Stobbs factor in TEM imaging
Background contrast in TEM/STEM images
Phase shift of electrons depending on scattering angle in TEM/STEM
TEM modeling/simulation
Phase-contrast in TEM images
TEM designs for biological applications
FEI TEMs
JEOL TEMs
TEM imaging on biological materials
Focusing in TEM imaging
Hysteresis factor in TEMs
Magnification and its adjustment in TEM
Comparison of lens conditions between TEM diffraction and TEM imaging modes
Goniometer stage in TEMs/STEMs
Sample damage in TEM measurements
Electronic noise in TEM/STEM/SEM/EELS/EDS systems
Signal-to-noise ratio in TEM/STEM images
In Situ TEM/STEM
In Situ liquid TEM/STEM analysis
Liquid TEM and STEM stage and holder
Lorentz lens for TEMs
EELS measurements in TEM imaging mode
Advantages and disadvantages of low voltage TEM and STEM
Advantages and disadvantages of TEM-related techniques
Manufacturers/companies producing FIB & EM instruments
Installation/room/environment of EM systems
Angular distribution of signal/information from TEM measurements
Voltage axis in TEM
Cryogenic transmission electron microscopy (cryo-TEM)
TEM operation
Image-shift function and its lens in TEM
Acquisition of STEM images/STEM operation
Alignments
Optical condition for high-magnification imaging in TEM
Voltage centering in TEM
Current centering in TEM
Tilt of electron beam in EMs
Autofocus methods in TEM imaging
Anode wobbler in TEM
Streaking artifact in TEM/STEM images
Challenges of TEM analysis on nanoparticles
Accuracy of CD (critical dimension) measurements using TEM
Scan speed/Dwell time in TEM/STEM imaging
TEM analysis of defects in amorphous materials
TEM specimen preparation for defect analysis in amorphous materials
TEM analysis of short range ordering in amorphous materials
TEM analysis of particular materials
TEM analysis of metallic materials
TEM analysis of ceramics
TEM analysis of catalysts
Defect analysis by TEM/STEM
Interface analysis by TEM/STEM
TEM:
Image contrast
Comparison between TEM and STEM bright field imagings
Dependence of image contrast on accelerating voltage in TEM/STEM
TEM contrast and underfocus/defocus
Contrast reversal of bright field TEM/STEM images
Diffraction contrast in TEM images
TEM contrast/fringes at interface between two materials
In-focus in TEM imaging
Fresnel fringes in TEM images
TEM contrast limit of chemical elements
Contrast delocalization/blurring effect in TEM images
TEM detection limit of bubble/void/holes in materials
TEM/HRTEM contrast of bubble/void/holes in materials
Mass-thickness contrast in TEM images
Mass-thickness contrast in STEM Images
TEM Sample
Basic requirements of TEM specimen
TEM sample thickness satisfying weak phase criterion
TEM sample thickness for STEM and EELS ~ Mean Free Path
Diffraction pattern formed in objective plane
Secondary electrons emitted from TEM thin film
Sample location in TEM system
Double cross-sections for examination of damage of prepared EM sample surface
Thin TEM sample to avoid multiple/plural scattering
Biological TEM specimen
Poor TEM sample quality limiting data interpretation
Poor TEM sample quality limiting quantitative analysis
Theoretical model for TEM samples
Sample storage in TEMs and operation time reduction
Argon implantation occurring in TEM sample milling process
Dependence of single and multiple inelastical scatterings of electrons on TEM sample thickness
CBED Kikuchi pattern contrast depending on samples thickness
Mechanical vibration/thermal effects on EMs: e.g. sample drift
Avoid damaging fragile TEM samples
Phase shift of incident electrons induced by TEM specimen
Image rotation in EMs
Wobbler for condenser lens excitation in TEM/STEM
TEM film thickness dependence of Fresnel fringes
Wobbler for high tension in TEM/STEM
Object plane (sample plane) of objective lens
Damage of TEM specimen holder
Effects of amorphous layer and specimen thickness on high resolution STEM images
Dynamical scattering of electrons in thick TEM specimen
Projected potential model for TEM specimens
TEM/STEM specimen holders
Applications of wedge-shaped TEM specimen in EM analysis
Electron beam damage depending on TEM/SEM specimen thickness
Elastic relaxation due to TEM-specimen thinning
TEM/STEM holders for in-situ synthesis and characterizations
Specimen (stage) drift/instability/movement in TEMs/STEMs
Step size used for beam damage reduction during elemental mapping
Electron scattering within TEM specimen
Electron absorption EM specimen (& thickness dependence)
Fraction of transmitted electrons depending on sample thickness
TEM sample height in TEM system
Change of image due to change of TEM sample height
Change of diffraction pattern due to change of TEM sample height
Defocus effect due to change of TEM sample height
TEM specimen traverse induced by specimen tilt
TEM specimen traverse induced by beam tilt
TEM sample preparations
Coating of TEM specimen to reduce beam damage & sputtering
Carbon coating on TEM samples – to avoid charging effect
Extremely high quality TEM/STEM sample preparation
Electropolishing for TEM sample preparation
TEM specimen preparation by crushing bulk crystals
TEM specimen preparation by chemical etching
TEM specimen preparation for defect analysis in amorphous materials
Ultrathin specimen preparation by low-energy Ar-ion milling
TEM sample preparation for atomic short-range ordering analysis
TEM specimen requirements in semiconductor industry
Methanol applied in TEM sample preparation
TEM specimen grids for EDS analysis
Wedge polishing method for TEM specimen preparation
Microtome for specimen-sectioning
High pressure freezing (HPF) for TEM sample preparation
Argon milling for TEM specimen preparation
TEM sample preparation by FIB
Advantages and disadvantages of FIB technology for EM sample preparations
Curtain effect in FIB-EM sample preparation
Mounting of TEM grid in grid-holder of FIB system
Plasma cleaning of FIB prepared specimens
Temperature increase/heat generation in TEM sample preparation by FIB
Temperature increase/heat generation in FIB deposition
Tungsten deposition by FIB
Requirements and preparation of nano-particles TEM samples
Ultra-thin TEM specimens prepared by FIB milling
Large uniform-thickness FIB-TEM specimen preparation
Cryo-focused ion beam-SEM (FIB-SEM)
Polymer TEM sample preparation
TEM sample preparation by ion milling
Preferential ion milling at grain boundaries
TEM sample preparation method of mechanical polishing + ion milling
Cryo-preparations of TEM specimens
Cryo-focused ion beam-SEM (FIB-SEM)
TEM specimen contamination
Hydrocarbon (HC) and carbon contamination of EM specimens
Carbon contamination effects on EELS measurements & its reduction
Cold trap to prevent contamination of TEM specimen
Electron beam flooding/beam shower to eliminate contamination effects in EMs
TEM simulations
Multislice simulation (MS) of TEM images
TEM:
Analytical electron microscopy (STEM/TEM)
HRTEM (High Resolution TEM) and its improvement
Bright-field (BF) imaging in TEM
Selected-area electron diffraction (SAED) in TEM
Dark-field (BF) imaging in TEM
convergent beam diffraction (CBED)
Electron energy loss spectra (EELS)
Energy dispersive X-ray spectra (EDS)
Best TEM imaging conditions
Image contrast in aberration-corrected EMs
Different TEM techniques for crystalline grains in various sizes
Low dose TEM/STEM imaging
Dislocation formation during TEM observation
TEM examples
Examples of TEM/STEM systems/models
TEM analysis of magnetic materials
TEM 3D (three-dimensional) tomography
Tilt tomography in TEM and STEM
Single particle analysis
Tilt HAAD STEM tomography
Crystal growth in ICs studied by electron tomography
Confocal/focal series STEM
Tilt azimuth restorations in TEM imaging
Resolution in electron tomography
Artifact in electron tomography
Temporal coherence/incoherence in EMs
Temporal coherence/incoherence of electron source
Contribution of partial temporal coherence to diffractograms
Temporal-coherence envelope function
Temperature
Operating temperature in electron guns
Temperature dependence of unit cell volume in crystals
Melting/temperature rise of materials in FIB processes
Operating temperature of CCD cameras
Heating temperature of electron guns
Temperature rise/heating induced by ion and electron beams
Temperature rise in STEM measurement
Temperature increase/heat generation by electron irradiation
Temperature increase/heat generation in TEM sample preparation by FIB
Temperature increase/heat generation in FIB deposition
Ternary tungsten oxides
Telegram chat groups for electron microscopy, materials and biology
Telegram: results of electron microscopy survey
Tetrahedral lattices
Tetrahedral structure in amorphous materials
Text annotation on Gatan DigitalMicrograph
Tetragonal (T
d
) crystals
Palladium oxide (PdO)
4/m point group
4 point group
-4 point group
422 point group
-42m point group
4mm point group
4/mmm point group
Comparison between hexagonal and tetragonal (or orthorhombic) cells
Tetragonal space groups
I (body-centered) lattices/I-centering & their space groups
I4 (79)
I4
1
(80)
I-4 (82)
I4/m (87)
I4
1
/a (88)
I422 (97)
I4
1
22 (98)
I4mm (107)
I4cm (108)
I4
1
md (109)
I4
1
cd (110)
I-4m2 (119)
I-4c2 (120)
I-42m (121)
I-42d (122)
I4/mmm (139)
I4/mcm (140)
I4
1
/amd (141)
I4
1
/acd (142)
P (primitive) lattices & their space groups
P4 (75)
P4
1
(76)
P4
2
(77)
P4
3
(78)
P-4 (81)
P4/m (83)
P4
2
/m (84)
P4/n (85)
P4
2
/n (86)
P422 (89)
P42
1
2 (90)
P4
1
22 (91)
P4
1
2
1
2 (92)
P4
2
22 (93)
P4
2
2
1
2 (94)
P4
3
22 (95)
P4
3
2
1
2 (96)
P4mm (99)
P4bm (100)
P4
2
cm (101)
P4
2
nm (102)
P4cc (103)
P4nc (104)
P4
2
mc (105)
P4
2
bc (106)
P-42m (111)
P-42c (112)
P-42
1
m (113)
P-42
1
c (114)
P-4m2 (115)
P-4c2 (116)
P-4b2 (117)
P-4n2 (118)
P4/mmm (123)
P4/mcc (124)
P4/nbm (125)
P4/nnc (126)
P4/mbm (127)
P4/mnc (128)
P4/nmm (129)
P4/ncc (130)
P4
2
/mmc (131)
P4
2
/mcm (132)
P4
2
/nbc (133)
P4
2
/nnm (134)
P4
2
/mbc (135)
P4
2
/mnm (136)
P4
2
/nmc (137)
P4
2
/ncm (138)
Tetragonal tungsten bronze (TTB)
Thermal e-h Pair
Thermal conductivity
Thermal conductivity measurements
Table of thermal conductivities of materials
Thermal expansion coefficients
Anisotropy of thermal expansion coefficients due to defects
Thermal expansion measurements
Thermal diffuse scattering (TDS) of electrons in TEM
Thermal diffuse (quasi-elastically) scattering (TDS) & HAADF
Thermal-diffuse-scattering in in-situ heating HAADF-STEM
Energy filter applied to observation of thermal-diffuse streaks in electron diffractions
Inelastical phonon excitation & thermal diffuse scattering (TDS) of electrons in EMs
Dependence of thermal diffuse scattering on atomic number
Thermal oxidation of silicon
Thermionic electron emission guns
Comparison between different electron sources/guns
Tungsten electron gun
LaB
6
electron guns
Thermionic emission
Thermo-plastic expansion induced film bending due to FIB irradiation
Thermoelectric power and thermocouple
Thermal FEG
Thermogravimetric analysis (TGA)
Thermionic electron emission guns
Thermoelectric (Peltier) cooling
Thickness of EM samples
Thickness requirements of TEM samples for EELS/EFTEM/HAADF STEM
Contribution of specimen thickness to diffractograms
EELS artifacts from ultra-thin TEM specimens - surface effects
Dependence of signal types on sample thickness in EMs
Advantages and disadvantages between thin and thick/bulk sample in EMs
EM sample thickness dependence of spatial resolution
EDS spatial resolution depending on EM sample thickness
k-factor/ZAF correction due to sample thickness effect (x-ray absorption)
Sample thickness dependence of TEM image intensity/contrast
Mass-thickness contrast in TEM images
Spatial resolution of EFTEM affected by specimen thickness
TEM sample thickness determination by electron holography
Film thickness determination by X-ray reflectivity/interference
Optimization of specimen thickness for strain analysis by CBED
Optimization of specimen thickness for electron holography analysis
Dependence of EELS signal on TEM specimen thickness
Dependence of observable thickness on accelerating voltage in TEM/STEM
EELS spatial resolution depending on specimen thickness
Intensity of backscattering electrons (BSEs) depending on TEM sample thickness
Thickness correction of EFTEM and EELS measurements
Thickness determination of TEM/STEM samples
Sample thickness determination using CBED
Sample thickness determination using EELS/FETEM
Diffraction of thick TEM specimen
Parallax (film thickness) measurements
TEM/STEM film thickness measurements based on contamination spots
TEM sample thickness determination through diffraction
Overall electron diffraction and Kikuchi lines depending on TEM sample thickness
TEM sample thickness determination by thickness fringes: extinction distance
Dependence of BF/ADF-STEM intensity on specimen thickness
Thin-film approximations
Thin-foil criterion (thin-film approximation) in EDS measurement
Thon rings in bright-filed imaging
Third order aberrations
Third-order star aberration
Third-order spherical aberration correction
Thorium (Th)
EDS measurement of thorium (Th)
Three
Determination of threefold astigmatism in TEM measurements
Three-window method for EFTEM/EELS elemental mapping/quantification
Three-fold symmetry of electromagnetic fields
Threefold astigmatism of objective lens in TEM
Three-dimensional sectioning of specimens using STEM
3D effect and relevant correction in EDS quantification
Three-dimensional (3-D) lattice
Three-fold axis in crystals
Rotation method for three dimensional (3D) electron diffraction recording
Through-the-lens (in-lens/immersion lens) SEM detectors
Throughput limiting factors in TEM observations
Tilt
Beam-tilt induced effects in TEM
Sample-tilt induced effects in TEM
Tilt tomography in TEM and STEM
Diffraction variation due to TEM sample tilt
Accuracies of beam tilt & of alignment of zone axis
Tilt of electron beam in EMs
Alignment of zone axis following Kikuchi lines by tilting EM samples
Electron-beam-tilt-induced image displacement in TEM
Zemlin tableaus method
Gun-alignment coil control system/gun shift and tilt in EMs
HRSTEM image contrast as function of crystal tilt
HRSEM image contrast as function of crystal tilt
Standard focus/Eucentric height versus sample tilt in TEM
Beam tilt in aberration corrected TEM
Wobbler for coma-free alignment with beam tilt
Tilt & shift and their purities/pivot point/rocking point in TEM
TEM specimen traverse induced by beam tilt
TEM specimen traverse induced by specimen tilt
Maximum achievable sample-tilt-angle in TEM
Beam tilt with dark-field deflection coils
Specimen quality depending on sample tilting in FIB
Time
Time of occurrence of various physical and chemical phenomena
Responding time of Auger electron emission for electron irradiation
Responding time of SE emission for electron irradiation
Responding time of photon emission for electron irradiation
Responding time of phonon emission for electron irradiation
Time constant/peaking time/shaping time of EDS amplifier
Time to electromigration-induced failures
Comparison of data acquisition times of various techniques
EDS acquisition time
Speed and time related to electron microscopy and materials
Tin (Sn)
EELS of tin (Sn)
Cu
2
ZnSnSe
4
Extinctions and weak spots showing in electron diffraction patterns of tin (Sn)
Misfit layer chalcogenides: (AX)
1+δ
(BX
2
)
n
(A = rare earth/Sn/Pb/Sb/Bi; B = Ti/V/Cr/Nb/Ta; X = S/Se)
La
2
CuSnO
6
SiSn
Sn-based metallic-glass alloys
X-Sn alloys
Titanium (Ti)
Doped and undoped BaTiO
3
CaTiO
3
Atomic-number contrast of Ti ions
Doped and undoped strontium titanate (SrTiO
3
)
Lanthanum titanate (LaTiO
3
)
Superlattice of SrTiO
3
and LaTiO
3
TMO
6
(e.g. TiO
6
) octahedral lattice
Titanium in ICs
Misfit layer chalcogenides: (AX)
1+δ
(BX
2
)
n
(A = rare earth/Sn/Pb/Sb/Bi; B = Ti/V/Cr/Nb/Ta; X = S/Se)
PbTiO
3
Titanium nitride (Ti
2
N/TiN)
Al/Ti/W/TiN stack used for VLSI
X-Ti phase diagrams
TiO
2
TiCl
4
-Ether complex
Ti-W alloy
Ca
1-x
Sr
x
TiO
3
Cu
x
Zr
y
Ti
z
Ti-based metallic-glass alloys
EDS and WDS measurements of titanium
EELS of titanium
Tomographic properties of SEM and dual-beam techniques
Top-entry and side-entry lens in TEM systems
Top-entry type EDS detector
Top-entry goniometer stages/holders in TEMs/STEMs
Top-hat filtering and bottom-hat filtering
Top-hat filter for EELS
Topographic contrast (sharpness) in SEM
Topographic contrast (sharpness) depending on beam energy in SEM
Topographic contrast (sharpness) affected by the detector position in SEM
Total correction function
Total, partial and integral cross-sections for inner-shell ionization
Trace, major, minor elements in materials
Trajectories
Trajectory of secondary electrons
Trajectories of electron in electron lenses
Trajectories of incident high-energy electrons in materials
Transducers
Transducer of light to electrical signal
Transformation
Martensitic transformation
Transmitted electron beam intensity in TEM
Transmission probability of secondary electrons across surface potential to vacuum
Transition
Metal-insulator transition (MIT) with change of temperature
Interband transitions
Transition probability from initial state to final state
Possible electron transitions giving rise to characteristic X-rays
EELS transitions
AES transitions
Driving force for the phase transition in materials
Dipole transitions in electron excitations
Transition temperatures of multiple phases
Reduced glass transition temperature
Glass transition of metallic glasses
Transition metal
Transition metals in Periodic table
TMO
6
octahedral lattice
3d transition metal
Transition-metal complexes
Precipitation of transition metals
Translational symmetries (Space group)
Glide planes
Screw-axis
Traps
Electron traps in electron microscopy (EM)-related system
Deep level traps and charged defects in materials
Trapping pumps/Entrainment pumps
Transverse spherical aberration
Trench structures
Triangular lattice
Triclinic crystals
1 point group
-1 point group
Triclinic space groups
P (primitive) lattices & their space groups
P1 (1)
P-1 (2)
Trigonal crystals
HRTEM and electron diffraction of crystals with trigonal symmetry
Indexing of trigonal and hexagonal systems
321 point group
-3m1 point group
Trigonal space groups
R-centered lattices/R-centering & its space groups
R3 (146)
R-3 (148)
R32 (155)
R3m (160)
R3c (161)
R-3m (166)
R-3c (167)
P (primitive) lattices & their space groups
P3 (143)
P3
1
(144)
P3
2
(145)
P-3 (147)
P312 (149)
P321 (150)
P3
1
12 (151)
P3
1
21 (152)
P3
2
12 (153)
P3
2
21 (154)
P3m1 (156)
P31m (157)
P3c1 (158)
P31c (159)
P-31m (162)
P-31c (163)
P-3m1 (164)
P-3c1 (165)
Triple twinning
Troubleshooting of EM-related systems
Troubleshooting of cathodoluminescence systems
Troubleshooting of DigiScan systems
Troubleshooting of microscope computers
Troubleshooting of EELS/GIF measurements/systems
Gain variations
High energy loss
Thin TEM/STEM specimen
Troubleshooting of Gatan hardware and software
No GIF images/spectra
Troubleshooting related to GIF software and hardware
Troubleshooting of SEM imaging
Source of secondary electrons
Source of Backscattering Electrons
Tungsten
Tungsten deposition by FIB
Shell occupancies and binding energies of the electron shells in W
Emission of characteristic X-rays in tungsten
Tungsten electron gun
Tetragonal tungsten bronze (TTB)
Niobium tungsten oxides
Ternary tungsten oxides
Comparison between different electron sources/guns
Pb
x
Nb
1.17
W
1.0
O
5.93+x
EELS measurement of tungsten (W)
X–W phase diagrams
Al
x
W
y
Tungsten in ICs
WSi
x
Tungsten nitride (WN
x
)
EDS and WDS measurements of tungsten
Tunnels in crystals
Tetragonal tungsten bronze (TTB)
Turbo-molecular pumps (TMPs)
Twin condenser lens systems in EMs
Twinning and twin boundaries
Σ3 grain and twin boundaries in FCC materials
Σ11 grain and twin boundaries in FCC materials
Σ43 grain and twin boundaries in FCC materials
Σ99 grain and twin boundaries in FCC materials
Triple twinning
Example of indexing electron diffraction pattern from twins
Two-beam diffraction conditions/first Bethe approximation in TEM measurements
Sample thickness determination using CBED
Burgers vector determination of dislocations
Two-beam dynamical electron scattering/diffraction
Two-beam kinematic electron scattering/diffraction
Beam intensities at two-beam diffraction condition
Two-dimensional (2-D)
Two-dimensional (2D) hexagonal atomic sheet
Two-dimensional (2-D) lattice
Two-fold
Difference between axial coma and twofold astigmatism
Twofold astigmatism
Two-fold axial astigmatism: aberration coefficient C
1,2
/A
1
Aberrations with two fold symmetry
Twofold superstructure
Twofold axis in crystals
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