Practical Electron Microscopy and Database

An Online Book, Second Edition by Dr. Yougui Liao (2006)

Practical Electron Microscopy and Database - An Online Book

Table of Contents/Index

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

t2g & eg symmetries/states Tags on Gatan Digital Micrograph
Tabletop/desktop/portable SEM Take-off angle in EDS system
Taylor and Maclaurin series Taylor cone
Tantalum (Ta) Copper (Cu) interconnects with tantalum (Ta) barrier
EDS measurement of tantalum (Ta) Ta2O5
TaSiNx TaSix 
TaN Misfit layer chalcogenides: (AX)1+δ(BX2)n (A =ˆ rare earth/Sn/Pb/Sb/Bi; B =ˆ Ti/V/Cr/Nb/Ta; X =ˆ S/Se)
Techniques for material characterizations
Techniques in electron microscopes Techniques for dopant profiling in semiconductors
Analysis techniques for ferroelectric materials Spatial resolutions between various techniques
Techniques of physical failure analysis (PFA) for ICs Techniques used to detect/measure charges in EM samples
Techniques for silicides' analysis
Television (TV) camera for EMs
Tellurium (Te)
EELS of tellurium (Te) GexSbyTez (GST)
Te-X phase diagrams Te-based metallic-glass alloys
TEM/Conventional TEM (CTEM)
Comparison between CTEM and STEM Comparison of TEM and SEM
Comparison among TEM, APT, ToF SIMS and ICP-MS ExSolve Wafer TEM Prep DualBeam, TEMLink and Thermo Fisher Metrios TEM 
ExSolve Wafer TEM Prep DualBeam  
Applications of TEM-related techniques Defocus in TEM imaging
EELS and quantitative analysis in TEM imaging mode   Instability of TEM imaging due to specimen charging
Hybrid TEMs Schematic diagram of TEM systems
Aberration correction in CTEM Cs corrector in TEM
Position of parts in TEM system Phonon effect on TEM imaging
Imaging geometries of TEM and STEM systems Wavefunction affected by aberrations in CTEM
Underfocusing objective lens in TEMs Image shift/drift in TEM
Intensity/signal comparison between STEM and CTEM Virtual objective aperture (VOA) in TEM/STEM
Probe shift in TEM system when switching between TEM and other modes TEM experimental determination of lattice parameters
TEM image processing and deconvolution History of TEM
Interpretation of TEM/STEM Images Diffraction contrast in TEM images
Ultrahigh voltage TEMs Optimized low voltage EMs for high performances
Caustic image in TEM Diffraction pattern formed in imaging condition/image plane/objective plane
Electron-beam-tilt-induced image displacement in TEM Electron-beam-tilt-induced coma in TEM
Contrast transfer function (CTF, Phase CTF, or PCTF) Modulation Transfer Function (MTF) of detectors in EM
STEM/TEM imaging with incoherent electrons  
Stobbs factor in TEM imaging Background contrast in TEM/STEM images
Phase shift of electrons depending on scattering angle in TEM/STEM TEM modeling/simulation
Phase-contrast in TEM images TEM designs for biological applications
FEI TEMs JEOL TEMs
TEM imaging on biological materials Focusing in TEM imaging
Hysteresis factor in TEMs Magnification and its adjustment in TEM
Comparison of lens conditions between TEM diffraction and TEM imaging modes Goniometer stage in TEMs/STEMs
Sample damage in TEM measurements Electronic noise in TEM/STEM/SEM/EELS/EDS systems
Signal-to-noise ratio in TEM/STEM images In Situ TEM/STEM
In Situ liquid TEM/STEM analysis Liquid TEM and STEM stage and holder
Lorentz lens for TEMs EELS measurements in TEM imaging mode
Advantages and disadvantages of low voltage TEM and STEM Advantages and disadvantages of TEM-related techniques
Manufacturers/companies producing FIB & EM instruments Installation/room/environment of EM systems
Angular distribution of signal/information from TEM measurements Voltage axis in TEM
Cryogenic transmission electron microscopy (cryo-TEM) Practical beam current of STEM technique in TEM
TEM operation
JEOL 2100 TEM operation manual FEI TEM operation manuals
Image-shift function and its lens in TEM Acquisition of STEM images/STEM operation 
Alignments Optical condition for high-magnification imaging in TEM
Voltage centering in TEM Current centering in TEM
Tilt of electron beam in EMs Autofocus methods in TEM imaging
Anode wobbler in TEM Streaking artifact in TEM/STEM images
Challenges of TEM analysis on nanoparticles Difficulties/challenges: advanced TEM-related measurements for semiconductor failure analyses
Scan speed/dwell time of detectors and cameras in TEM/STEM imaging and elemental mapping Accuracy of CD (critical dimension) measurements using TEM
TEM analysis of defects in amorphous materials
TEM specimen preparation for defect analysis in amorphous materials
TEM analysis of short range ordering in amorphous materials
In situ FIB lift-out TEM sample preparation Voids generated during TEM sample preparation
TEM analysis of particular materials 
TEM analysis of metallic materials TEM analysis of ceramics
TEM analysis of catalysts Defect analysis by TEM/STEM
Interface analysis by TEM/STEM
TEM: Image contrast
Comparison between TEM and STEM bright field imagings Dependence of image contrast on accelerating voltage in TEM/STEM
TEM contrast and underfocus/defocus Contrast reversal of bright field TEM/STEM images
Diffraction contrast in TEM images TEM contrast/fringes at interface between two materials
In-focus in TEM imaging Fresnel fringes in TEM images
TEM contrast limit of chemical elements Contrast delocalization/blurring effect in TEM images
TEM detection limit of bubble/void/holes in materials TEM/HRTEM contrast of bubble/void/holes in materials
Mass-thickness contrast in TEM images Mass-thickness contrast in STEM Images
TEM Sample  
Basic requirements of TEM specimen TEM sample thickness satisfying weak phase criterion
TEM sample thickness for STEM and EELS ~ Mean Free Path Diffraction pattern formed in objective plane
Secondary electrons emitted from TEM thin film Sample location in TEM system
Double cross-sections for examination of damage of prepared EM sample surface Thin TEM sample to avoid multiple/plural scattering
Biological TEM specimen Poor TEM sample quality limiting data interpretation
Poor TEM sample quality limiting quantitative analysis Theoretical model for TEM samples
Sample storage in TEMs and operation time reduction Argon implantation occurring in TEM sample milling process
Dependence of single and multiple inelastical scatterings of electrons on TEM sample thickness CBED Kikuchi pattern contrast depending on samples thickness
Mechanical vibration/thermal effects on EMs: e.g. sample drift   Avoid damaging fragile TEM samples
Phase shift of incident electrons induced by TEM specimen Image rotation in EMs
Wobbler for condenser lens excitation in TEM/STEM TEM film thickness dependence of Fresnel fringes
Wobbler for high tension in TEM/STEM Object plane (sample plane) of objective lens
Damage of TEM specimen holder Effects of amorphous layer and specimen thickness on high resolution STEM images
Dynamical scattering of electrons in thick TEM specimen Projected potential model for TEM specimens
TEM/STEM specimen holders Applications of wedge-shaped TEM specimen in EM analysis
Electron beam damage depending on TEM/SEM specimen thickness Elastic relaxation due to TEM-specimen thinning
TEM/STEM holders for in-situ synthesis and characterizations Specimen (stage) drift/instability/movement in TEMs/STEMs
Step size used for beam damage reduction during elemental mapping Electron scattering within TEM specimen
Electron absorption EM specimen (& thickness dependence) Fraction of transmitted electrons depending on sample thickness
TEM sample height in TEM system
Change of image due to change of TEM sample height Change of diffraction pattern due to change of TEM sample height
Defocus effect due to change of TEM sample height TEM specimen traverse induced by specimen tilt
TEM specimen traverse induced by beam tilt
TEM sample preparations
Coating of TEM specimen to reduce beam damage & sputtering Carbon coating on TEM samples – to avoid charging effect
Extremely high quality TEM/STEM sample preparation Electropolishing for TEM sample preparation
TEM specimen preparation by crushing bulk crystals TEM specimen preparation by chemical etching
TEM specimen preparation for defect analysis in amorphous materials Ultrathin specimen preparation by low-energy Ar-ion milling
TEM sample preparation for atomic short-range ordering analysis TEM specimen requirements in semiconductor industry
Methanol applied in TEM sample preparation TEM specimen grids for EDS analysis
Wedge polishing method for TEM specimen preparation Microtome for specimen-sectioning
High pressure freezing (HPF) for TEM sample preparation Argon milling for TEM specimen preparation
TEM sample preparation by FIB
Advantages and disadvantages of FIB technology for EM sample preparations Curtain effect in FIB-EM sample preparation
Mounting of TEM grid in grid-holder of FIB system Plasma cleaning of FIB prepared specimens
Temperature increase/heat generation in TEM sample preparation by FIB Temperature increase/heat generation in FIB deposition
Tungsten deposition by FIB Requirements and preparation of nano-particles TEM samples
Ultra-thin TEM specimens prepared by FIB milling Large uniform-thickness FIB-TEM specimen preparation
Cryo-focused ion beam-SEM (FIB-SEM) Polymer TEM sample preparation
TEM sample preparation by ion milling
Preferential ion milling at grain boundaries TEM sample preparation method of mechanical polishing + ion milling
Cryo-preparations of TEM specimens
Cryo-focused ion beam-SEM (FIB-SEM)
TEM specimen contamination 
Hydrocarbon (HC) and carbon contamination of EM specimens Carbon contamination effects on EELS measurements & its reduction
Cold trap to prevent contamination of TEM specimen Electron beam flooding/beam shower to eliminate contamination effects in EMs
Electron Beam Testing (EBT)
TEM simulations
Multislice simulation (MS) of TEM images
TEM: Analytical electron microscopy (STEM/TEM)
HRTEM (High Resolution TEM) and its improvement Bright-field (BF) imaging in TEM 
Selected-area electron diffraction (SAED) in TEM Dark-field (BF) imaging in TEM
convergent beam diffraction (CBED) Electron energy loss spectra (EELS)
Energy dispersive X-ray spectra (EDS) Best TEM imaging conditions
Image contrast in aberration-corrected EMs Different TEM techniques for crystalline grains in various sizes
TEM techniques for failure analysis of IC devices   
Low dose TEM/STEM imaging Dislocation formation during TEM observation
TEM examples
Examples of TEM/STEM systems/models TEM analysis of magnetic materials
TEM 3D (three-dimensional) tomographySample preparation for tomography in TEM
Types of electron tomography rotation/tilt schemes Reconstructing a three-dimensional (3D) image from 2D images in STEM tomography
Tilt tomography in TEM and STEM Single particle analysis
Tilt HAAD STEM tomography Crystal growth in ICs studied by electron tomography
Confocal/focal series STEM Tilt azimuth restorations in TEM imaging
Resolution in electron tomography Artifact in electron tomography
Temporal coherence/incoherence in EMs
Temporal coherence/incoherence of electron source Contribution of partial temporal coherence to diffractograms
Temporal-coherence envelope function
Temperature 
Operating temperature in electron guns Temperature dependence of unit cell volume in crystals
Melting/temperature rise of materials in FIB processes Operating temperature of CCD cameras
Heating temperature of electron guns
  Temperature rise/heating induced by ion and electron beams
Temperature rise in STEM measurement Temperature increase/heat generation by electron irradiation
Temperature increase/heat generation in TEM sample preparation by FIB Temperature increase/heat generation in FIB deposition
Ternary tungsten oxides Telegram chat groups for electron microscopy, materials and biology
Telegram: results of electron microscopy survey Tetrahedral lattices
Tetrahedral structure in amorphous materials Text annotation on Gatan DigitalMicrograph
 Tetragonal (Td) crystals
Palladium oxide (PdO) 4/m point group
4 point group -4 point group
422 point group -42m point group
4mm point group 4/mmm point group
Comparison between hexagonal and tetragonal (or orthorhombic) cells
Tetragonal space groups
I (body-centered) lattices/I-centering & their space groups
I4 (79) I41 (80)
I-4 (82) I4/m (87)
I41/a (88) I422 (97)
I4122 (98) I4mm (107)
I4cm (108) I41md (109)
I41cd (110) I-4m2 (119)
I-4c2 (120) I-42m (121)
I-42d (122) I4/mmm (139)
I4/mcm (140) I41/amd (141)
I41/acd (142)
P (primitive) lattices & their space groups
P4 (75) P41 (76)
P42 (77) P43 (78)
P-4 (81) P4/m (83)
P42/m (84) P4/n (85)
P42/n (86) P422 (89)
P4212 (90) P4122 (91)
P41212 (92) P4222 (93)
P42212 (94) P4322 (95)
P43212 (96) P4mm (99)
P4bm (100) P42cm (101)
P42nm (102) P4cc (103)
P4nc (104) P42mc (105)
P42bc (106) P-42m (111)
P-42c (112) P-421m (113)
P-421c (114) P-4m2 (115)
P-4c2 (116) P-4b2 (117)
P-4n2 (118) P4/mmm (123)
P4/mcc (124) P4/nbm (125)
P4/nnc (126) P4/mbm (127)
P4/mnc (128) P4/nmm (129)
P4/ncc (130) P42/mmc (131)
P42/mcm (132) P42/nbc (133)
P42/nnm (134) P42/mbc (135)
P42/mnm (136) P42/nmc (137)
P42/ncm (138)
Tetragonal tungsten bronze (TTB) Thermal e-h Pair
Thermal conductivity
Thermal conductivity measurements Table of thermal conductivities of materials
Thermal expansion coefficients
Anisotropy of thermal expansion coefficients due to defects Thermal expansion measurements
Incoherent thermal diffuse scattering (TDS) electrons in (S)TEM
Thermal diffuse (quasi-elastically) scattering (TDS) & HAADF   Thermal-diffuse-scattering in in-situ heating HAADF-STEM
Energy filter applied to observation of thermal-diffuse streaks in electron diffractions Inelastical phonon excitation & thermal diffuse scattering (TDS) of electrons in EMs
Dependence of thermal diffuse scattering on atomic number Thermal oxidation of silicon
Thermionic electron emission guns  Key Geometric, Materials, Thermal, and Electrical Tolerances in SEM
Comparison between different electron sources/guns
Tungsten electron gun LaB6 electron guns
Thermionic emission Thermo-plastic expansion induced film bending due to FIB irradiation
ExSolve Wafer TEM Prep DualBeam, TEMLink and Thermo Fisher Metrios TEM  Thermo Fisher Metrios TEM
Thermoelectric power and thermocouple Thermal FEG
Thermogravimetric analysis (TGA) Thermionic electron emission guns
Thermoelectric (Peltier) cooling
Thickness of EM samples
Thickness requirements of TEM samples for EELS/EFTEM/HAADF STEM Contribution of specimen thickness to diffractograms
EELS artifacts from ultra-thin TEM specimens - surface effects Dependence of signal types on sample thickness in EMs
Advantages and disadvantages between thin and thick/bulk sample in EMs EM sample thickness dependence of spatial resolution
EDS spatial resolution depending on EM sample thickness k-factor/ZAF correction due to sample thickness effect (x-ray absorption)
Sample thickness dependence of TEM image intensity/contrast Mass-thickness contrast in TEM images
Spatial resolution of EFTEM affected by specimen thickness TEM sample thickness determination by electron holography
Film thickness determination by X-ray reflectivity/interference Optimization of specimen thickness for strain analysis by CBED
Optimization of specimen thickness for electron holography analysis Dependence of EELS signal on TEM specimen thickness
Dependence of observable thickness on accelerating voltage in TEM/STEM EELS spatial resolution depending on specimen thickness
Intensity of backscattering electrons (BSEs) depending on TEM sample thickness Thickness correction of EFTEM and EELS measurements
Thickness determination of TEM/STEM samples
Sample thickness determination using CBED Sample thickness determination using EELS/FETEM
Diffraction of thick TEM specimen Parallax (film thickness) measurements
TEM/STEM film thickness measurements based on contamination spots TEM sample thickness determination through diffraction
Overall electron diffraction and Kikuchi lines depending on TEM sample thickness TEM sample thickness determination by thickness fringes: extinction distance
Dependence of BF/ADF-STEM intensity on specimen thickness
 Thin-film approximations
Thin-foil criterion (thin-film approximation) in EDS measurement
Thon rings in bright-filed imaging
Third order aberrations
Third-order star aberration Third-order spherical aberration correction 
Thorium (Th) 
EDS measurement of thorium (Th)
Three
Determination of threefold astigmatism in TEM measurements Three-window method for EFTEM/EELS elemental mapping/quantification
Three-fold symmetry of electromagnetic fields Threefold astigmatism of objective lens in TEM
Three-dimensional sectioning of specimens using STEM 3D effect and relevant correction in EDS quantification
Three-dimensional (3-D) lattice Three-fold axis in crystals
Rotation method for three dimensional (3D) electron diffraction recording
Threading dislocation (TD) Throughput limiting factors in TEM observations
Through-the-lens (in-lens/immersion lens) SEM detectors Throughput in E-beam Inspection
Tilt
Beam-tilt induced effects in TEM Sample-tilt induced effects in TEM
Tilt tomography in TEM and STEM Diffraction variation due to TEM sample tilt
Accuracies of beam tilt & of alignment of zone axis Tilt of electron beam in EMs
Alignment of zone axis following Kikuchi lines by tilting EM samples Electron-beam-tilt-induced image displacement in TEM
Zemlin tableaus method Gun-alignment coil control system/gun shift and tilt in EMs
HRSTEM image contrast as function of crystal tilt HRSEM image contrast as function of crystal tilt
Standard focus/Eucentric height versus sample tilt in TEM Beam tilt in aberration corrected TEM
Wobbler for coma-free alignment with beam tilt Tilt & shift and their purities/pivot point/rocking point in TEM
TEM specimen traverse induced by beam tilt
TEM specimen traverse induced by specimen tilt
Maximum achievable sample-tilt-angle in TEM Beam tilt with dark-field deflection coils
Specimen quality depending on sample tilting in FIB
Time
Time of occurrence of various physical and chemical phenomena Responding time of Auger electron emission for electron irradiation
Responding time of SE emission for electron irradiation Responding time of photon emission for electron irradiation
Responding time of phonon emission for electron irradiation Time constant/peaking time/shaping time of EDS amplifier
Time to electromigration-induced failures Comparison of data acquisition times of various techniques
EDS acquisition time Speed and time related to electron microscopy and materials
 Tin (Sn)
EELS of tin (Sn)
Cu2ZnSnSe4 
Extinctions and weak spots showing in electron diffraction patterns of tin (Sn) Misfit layer chalcogenides: (AX)1+δ(BX2)n (A =ˆ rare earth/Sn/Pb/Sb/Bi; B =ˆ Ti/V/Cr/Nb/Ta; X =ˆ S/Se)
La2CuSnO6 SiSn
Sn-based metallic-glass alloys X-Sn alloys
Titanium (Ti)
Doped and undoped BaTiO3 CaTiO3
Atomic-number contrast of Ti ions Doped and undoped strontium titanate (SrTiO3 )
Lanthanum titanate (LaTiO3) Superlattice of SrTiO3 and LaTiO3
TMO6 (e.g. TiO6) octahedral lattice
Titanium in ICs
Misfit layer chalcogenides: (AX)1+δ(BX2)n (A =ˆ rare earth/Sn/Pb/Sb/Bi; B =ˆ Ti/V/Cr/Nb/Ta; X =ˆ S/Se) PbTiO3
Titanium nitride (Ti2N/TiN) Al/Ti/W/TiN stack used for VLSI
X-Ti phase diagrams TiO2
TiCl4-Ether complex Ti-W alloy
Ca1-xSrxTiO3
CuxZryTiz Ti-based metallic-glass alloys
EDS and WDS measurements of titanium EELS of titanium
Tomographic properties of SEM and dual-beam techniques Top-entry and side-entry lens in TEM systems
Top-entry type EDS detector Top-entry goniometer stages/holders in TEMs/STEMs
Top-hat filtering and bottom-hat filtering Top-hat filter for EELS
Topographic contrast (sharpness) in SEM
Topographic contrast (sharpness) depending on beam energy in SEM Topographic contrast (sharpness) affected by the detector position in SEM
Total correction function Total, partial and integral cross-sections for inner-shell ionization
Trace, major, minor elements in materials
Trajectories
Trajectory of secondary electrons Trajectories of electron in electron lenses
Trajectories of incident high-energy electrons in materials
Transducers
Transducer of light to electrical signal
Transformation
Martensitic transformation
 
Transmitted electron beam intensity in TEM Transmission probability of secondary electrons across surface potential to vacuum
Transition
Metal-insulator transition (MIT) with change of temperature Interband transitions
Transition probability from initial state to final state Possible electron transitions giving rise to characteristic X-rays 
EELS transitions AES transitions
Driving force for the phase transition in materials Dipole transitions in electron excitations
Transition temperatures of multiple phases Reduced glass transition temperature
Glass transition of metallic glasses
Transition metal
Transition metals in Periodic table   TMO6 octahedral lattice
3d transition metal Transition-metal complexes
Precipitation of transition metals
Translational symmetries (Space group)
Glide planes Screw-axis
Traps 
Electron traps in electron microscopy (EM)-related system Deep level traps and charged defects in materials
Trapping pumps/Entrainment pumps
Transverse spherical aberration Trench structures
Triangular lattice
Triclinic crystals
1 point group -1 point group
Triclinic space groups
P (primitive) lattices & their space groups
P1 (1) P-1 (2)
Trigonal crystals
HRTEM and electron diffraction of crystals with trigonal symmetry Indexing of trigonal and hexagonal systems
321 point group -3m1 point group
Trigonal space groups
R-centered lattices/R-centering & its space groups
R3 (146) R-3 (148)
R32 (155) R3m (160)
R3c (161) R-3m (166)
R-3c (167)
P (primitive) lattices & their space groups
P3 (143) P31 (144)
P32 (145) P-3 (147)
P312 (149) P321 (150)
P3112 (151) P3121 (152)
P3212 (153) P3221 (154)
P3m1 (156) P31m (157)
P3c1 (158) P31c (159)
P-31m (162) P-31c (163)
P-3m1 (164) P-3c1 (165)
Triple twinning
 Troubleshooting of EM-related systems
Troubleshooting of cathodoluminescence systems Troubleshooting of DigiScan systems
Troubleshooting of microscope computers
Troubleshooting of EELS/GIF measurements/systems  
Gain variations High energy loss
Thin TEM/STEM specimen Troubleshooting of Gatan hardware and software
No GIF images/spectra Troubleshooting related to GIF software and hardware
Troubleshooting of SEM imaging
Source of secondary electrons Source of Backscattering Electrons
Tungsten
Tungsten deposition by FIB Shell occupancies and binding energies of the electron shells in W
Emission of characteristic X-rays in tungsten Tungsten electron gun
Tetragonal tungsten bronze (TTB) Niobium tungsten oxides
Ternary tungsten oxides Comparison between different electron sources/guns
PbxNb1.17W1.0O5.93+x EELS measurement of tungsten (W)
X–W phase diagrams AlxWy
Tungsten in ICs WSix
Tungsten nitride (WNx) EDS and WDS measurements of tungsten
Tunnels in crystals
Tetragonal tungsten bronze (TTB)
Turbo-molecular pumps (TMPs) Twin condenser lens systems in EMs
Twinning and twin boundaries
Σ3 grain and twin boundaries in FCC materials Σ11 grain and twin boundaries in FCC materials
Σ43 grain and twin boundaries in FCC materials Σ99 grain and twin boundaries in FCC materials
Triple twinning Example of indexing electron diffraction pattern from twins
Two-beam diffraction conditions/first Bethe approximation in TEM measurements
Sample thickness determination using CBED Burgers vector determination of dislocations
Two-beam dynamical electron scattering/diffraction Two-beam kinematic electron scattering/diffraction
Beam intensities at two-beam diffraction condition
Two-dimensional (2-D)
Two-dimensional (2D) hexagonal atomic sheet Two-dimensional (2-D) lattice
Two-fold
Difference between axial coma and twofold astigmatism Twofold astigmatism
Two-fold axial astigmatism: aberration coefficient C1,2/A1  Aberrations with two fold symmetry
Twofold superstructure Twofold axis in crystals