Practical Electron Microscopy and Database

An Online Book, Second Edition by Dr. Yougui Liao (2006)

Practical Electron Microscopy and Database - An Online Book

Table of Contents/Index

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

Accelerating voltage/tube in EMs and its Best-Known Methods (BKM)  
III-V compounds  
Vacancy  
Vacancy concentration at surface Vacancy concentration in bulk
Clustering of vacancies into dislocation loops Detection of vacancies
Vacancy detection by elemental diffusion Vacancy generation in FIB milling
Point defects (vacancy & interstitial) generated in Ar-milling  
Vacuum systems and its Best-Known Methods (BKM)
ACD (anti-contamination device) operation on TEM system Vacuum levels in EMs & units conversion
Mechanical vacuum pumps Vacuum levels and UHV (ultra-high vacuum) in EMs
Grease of vacuum seals Vacuum contamination in EMs
Vacuum of GIF camera chamber Vacuum sealed electron transparent windows for in-situ TEM
Vacuum evaporator in EMs Vacuum range/efficiency & pump combination
Vacuum at EM stages Vacuum requirements of EMs for microelectronics industry
Vacuum of electron source/gun  
van der Waals bonding-type substances  
Valence band: Outer-/Outermost-shell electrons (electrons in valence- and conduction-bands)
Valence electron energy loss spectroscopy (VEELS) Excitation of the valence-band/outer-shell electrons due to energetic electron irradiation
Density of valence electrons of materials Valence state controlled by charge neutrality
Comparison between VEELS and conventional optical spectroscopy Outer d shell electrons
Analysis of valence states by white-lines in EELS Conduction- & valence-band offsets
Comparison between valence band (outer) and core (inner) electrons Inelastic scattering from outer-shell electrons shown in EELS profile
Valence electron energy modified by bond formation Oxidation states (oxidation number, degree of oxidation) in periodic table
Atomic & ionic radii and valence states of chemical elements in periodic table  
Valves 
GIF gate valve Switching valves
Vanadium (V) 
Misfit layer chalcogenides: (AX)1+δ(BX2)n (A =ˆ rare earth/Sn/Pb/Sb/Bi; B =ˆ Ti/V/Cr/Nb/Ta; X =ˆ S/Se) EELS measurement of vanadium (V)
 
van de Graaff generators  
Vernier structures Vector description of crystal dislocations
Very-large-scale integration (VLSI) for ICs Via overetch detected by IR-OBIRCH
 Vibration
Mechanical vibration effects on EMs Vibration of atoms induced by electron irradiation
Vibrational spectroscopy in EELS Vibration of atoms/phonon
 
Video recording software on EMs Viewing screen/fluorescent screen in EMs
Visual inspection for destructive and/or nondestructive analysis of IC devices Virtual objective aperture (VOA) in TEM/STEM
Virtual objective aperture (VOA) in SEM VO2, V2O3, V6O13, and several Magnéli phase (VnO2n-1)
Visibility
Visibility of electron diffraction Visibility/contrast of dislocations and stacking faults in TEM and EMs
Visibility of Kikuchi lines Visible light
Visibility/contrast of images g·b analysis (visibility criterion) for analysis of Burgers vector and dislocations
Voids
Voids formed in Si at contact interfaces Void formation and circuit opening due to electromigration in ICs
Void detection in ICs Void-formation-induced failure in cobalt silicidation in ICs
Void formation by Nabarro–Herring creep  
Void/bubble/hole in materials
TEM detection limit of bubble/void/holes in materials TEM/HRTEM contrast of bubble/void/holes in materials
Voids generated during TEM sample preparation  
 Voltage
Ultrahigh voltage TEMs Voltage centering in TEM
Light-induced voltage alteration (LIVA) Thermally induced voltage alteration (TIVA)
Voltage of incident electrons for EELS measurements  Voltage at biprism filament in off-axis electron holography
Voltage doubler Voltage axis in TEM
 Voltage contrast in FIB and SEM Linearization of voltage contrast in SEM
Passive voltage contrast (PVC) in FIB and SEM Active voltage contrast (AVC) in FIB and SEM
Positive charging case of passive voltage contrast (PVC) in FIB and SEM Negative charging case of passive voltage contrast (PVC) in SEM
Artifacts in passive voltage contrast (PVC) in FIB and SEM Short failure in IC devices detected by passive voltage contrast (PVC)
Capacitive coupling voltage contrast (CCVC) Dynamic characteristics of voltage contrast
Interval scan of electron beam enhancing voltage contrast Electron Voltage Imaging (EVI) and Electron Voltage Probing (EVP)
Comparison between Electron-Beam-Probing (eBP) and Laser Voltage Imaging/Probing (LVI/LVP)
Volume of unit cells  

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