Practical Electron Microscopy and Database - An Online Book
Table of Contents/Index 
Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix
Chapter X  
Xenon
  XeF2   Xenon ion sputtering yield in milling
  Possible electron transitions giving rise to characteristic X-rays   Maximum escape depth of X-rays 
  X-ray atomic scattering factors   Shape of X-ray peak in EDS measurements
  X-ray optics   Consideration of X-radiation protection in EM design
  Bremsstrahlung X-rays   Characteristic X-rays & their peaks
  Characteristic X-rays energies of some elements   Electron Relaxation and X-Ray
  Peak position shift in EDS   Energy peak overlapping in EDS spectrum
  Elements with possible X-ray interferences in EDS   Characteristic X-ray energy versus critical ionization energy
  Wavelength dispersive X-ray spectroscopy (WDXRF/WDS)   Escape depth of X-rays
  Dependence of X-ray generation on atomic number   Wavelength (energy) of X-ray "particles" (photons)
  Electron probe X-ray microanalyzer (EPMA)   Initial and final levels for characteristic X-ray lines  
  X-ray applications   Channelling/diffraction enhanced X-ray emission in EDS measurements
  Mean free path of X-rays   Hard X-rays
  Film thickness determination by X-ray reflectivity/interference   Soft X-rays
  Wavelength of lights   X-ray emission by electron irradiation
  X-ray emission lines of all elements in periodic table   Interaction volumes for generation of characteristic X-rays
  X-ray fluorescence yield/weight   X-ray emission from multiple layers depending on accelerating voltages of electrons
  Interaction of X-ray with materials    
X-ray techniques comparing with other techniques
  Comparison between EDS and WDS   Comparison between XAS and EELS  
  Comparison between X-rays and energetic moving electrons   Comparison between X-ray (XRD) and electron diffractions
  Comparison between EDS and AES   Comparison between EDS and EELS
  Comparison of EDS measurements with low- & high-energy incident electrons   X-ray detectors & EDS comparison in SEM/TEM/STEM
  Physical modeling of EDS background   Signal to noise ratio of EDS
  X-ray peak to background ratio in EDS   Signal/noise filtering for EDS background calculation
  EDS background noise & modulation and their effects on analysis   Intensity of bremsstrahlung X-rays: Kramers' law
  Reduction of EDS background   Background shelf in EDS measurements
  Absorption of outgoing X-ray in EDS measurements   Secondary X-ray (fluorescence) in EDS measurements
  X-ray emission from multiple layers depending on accelerating voltages of electrons   Noise peaks in EDS measurement
  Stray radiation in EMs   Escape peak in EDS/X-ray profiles
  Sum peaks/coincidence peaks in x-ray/EDS profiles   Pile-up continuum in x-ray/EDS profiles
  X-rays generated by backscattered electrons   Energy peak overlapping in EDS spectrum
  Thickness-induced EDS artifacts   Ratio of EDS peak intensities of two elements
  Incomplete charge collection in EDS measurements   Channelling enhanced X-ray emission
  Broadening of EDS peaks   Distortion/asymmetry of X-ray peak from Gaussian shape in EDS
  Periodic table of X-ray absorption edges   EDS background noise & modulation and their effects on analysis
  X-rays generated by backscattered electrons   Background shelf in EDS measurements
  X-ray absorption energy   X-ray absorption induced by carbon contamination
  Near Edge X-Ray Absorption Fine Structure (NEXAFS)   X-Ray Absorption Near Edge Structure (XANES)
  Extended x-ray absorption fine structure (EXAFS)   X-ray Absorption Spectroscopy (XAS)  
  Beer’s law for EDS measurement   Mass absorption coefficients of X-rays
  Low voltage energy dispersive spectroscopy (LVEDS) or low-energy X-ray emission spectroscopy (LEXES)    
X-ray bolometer
  Comparison of various X-ray spectrometers    
  Kinematically diffracted electron and X-ray beams & their intensities   Artifacts and drawbacks of XRD technique
  Preferred orientation on X-ray diffraction patterns   Kossel lines in x-ray diffraction
  Comparison between X-ray (XRD) and electron diffractions   Full width at half maximum (FWHM) of X-ray diffraction lines
  XRD patterns of amorphous materials   XRD analysis of particles and nanostructures
  X-ray lines used in XRD analysis  

Peak splitting in XRD profiles
  Reflection numbers in XRD profiles   Phase identification with XRD and its procedure
  Synchrotron X-ray Diffraction   Evaluation of grain size by XRD technique
  JCPDS card for XRD analysis   Comparison between conventional and synchrotron X-ray Diffraction
  Comparison between single crystal and powder X-ray diffractions    
  K-family (Kα & Kβ) X-ray emission   L-family of characteristic X-ray emission
  M-family of characteristic X-ray emission    
  Advantage and Disadvantage of EDS     EDS principle  
  Dependence of EDS on accelerating voltages of incident electrons   Ratio of EDS peaks of the same elements
  Applications of EDS technique   Possible electron transitions giving rise to characteristic X-rays 
  Take-off angle (TOA) in EDS system   Sensitivity/detection limit/minimum detectable mass of EDS  
  EDS-TEM specimen holders   Elemental loss in EM specimen detected by EDS
  Secondary X-Ray (Fluorescence) in EDS Measurements   Objective lens versus EDS and EELS
  Elemental characterization in physical analysis of IC failure    
  Sensitivity/detection limit/minimum detectable mass of EDS   Accuracy of EDS quantification
  EDS measurements of minor and/or trace elements    
  Solid state detectors (SSDs)   Lithium-drifted silicon diodes & Si(Li) EDS detectors
  Ratio of EDS peak intensities of two elements   Position of EDS detector in EMs
  Field Effect Transistor (FET) preamplifier in EDS systems   Collection efficiency of EDS measurements/detectors
  Size of EDS detector in EMs   Distance effect on solid angle of EDS detector
  Collection angle/solid angle of EDS detector   Silicon drift EDS detectors (SDD)
  Collimator in EDS detectors in EMs   Peak-detector/peak-stretcher in EDS systems
  Spectroscopic amplifier in EDS system   Development history of X-ray analysis for EMs
  Maintenance of EDS system   Damage of EDS detectors
  Top-entry type EDS detector   EDS signal affected by secondary and backscattered electrons
  Evaluation of EDS detectors   Dead layers in EDS detectors
  Energy resolution of EDS   X-ray acquisition processing
  Reliability/reproducibility of EDS data & EDS system   Angular/polar distribution of X-ray generation in electron microscopy
  Considerations of operating conditions of EDS analytical microscopy   EDS energy calibration
  EDS acquisition time   EDS artifacts induced by beam damage
  Detection of high energy X-rays in EDS   Critical sample thickness for EDS measurement
  Dead time in EDS measurement   Maximizing EDS intensity/counts
  Live time in EDS measurements   Clock time in EDS measurements
  EDS measurements in aberration corrected TEMs   Chemical shift detection of elements by EDS
  Widths of X-ray peaks in EDS measurement   “Hole Count” in X-ray measurements
  Simultaneous EELS and EDS acquisition   Time constant/peaking time/shaping time of EDS amplifier
  Software for EDS spectrum acquisition and analysis   NSS EDS software
  Comparison of data acquisition times of various techniques   Optimization of EDS measurements
  Common factors affecting contrast/intensity of EELS & EDS    
  X-ray intensity affected by overvoltage   Spatial resolution dependence on overvoltages
  Broadening of EDS peaks   Thin-foil criterion (thin-film approximation) in EDS measurement
  Automatic qualitative EDS analysis   Deconvolution in EDS analysis
  EDS analysis of light elements   Correct and incorrect peak identification in EDS measurements
  Improvement/optimization of EDS analysis accuracy    
  Mass-thickness effects on EDS signal/intensity   Theoretical intensity of characteristic X-rays
  X-ray intensity affected by overvoltage   Common factors affecting contrast/intensity of EELS & EDS
  Maximizing EDS intensity/counts   Ratio of EDS peak intensities of two elements
  Intensity of bremsstrahlung X-rays: Kramers' law   Detailed energy & intensity (weight/yield) of K, L, & M lines for all elements
  EDS quantification with k-factors (Cliff-Lorimer factors)   EDS ZAF quantification mode & Matrix correction
  EDS PhiRhoZ (Phi-Rho-Z) quantification mode    
EDS quantification 
  Standardless EDS quantification   Quantitative EDS analysis with standards (calibrated)
      Mass-thickness effects on EDS signal/intensity
  Ratio technique for elemental quantification by EDS   Accuracy of EDS quantification
  EDS quantification of light elements   3D effect and relevant correction in EDS quantification
  EDS quantification of heavy elements   Low-energy X-rays and elemental quantification
  Linear least squares fitting technique   Multiple linear least-squares (MLLS) peak fitting for EDS analysis
  Digital-filtered least-squares peak fitting for EDS quantification   Count rate in EDS measurements
k-factor in EDS quantification 
  Cliff-Lorimer sensitivity factors/k-factors in EDS/x-rays   EDS quantification with k-factors (Cliff-Lorimer factors)
  k-factor determination and EDS calibration   k factor depending on operating voltage
  EDS k-factor affacted by probe size   k-factor/ZAF correction due to sample thickness effect ('thin-film' criterion)
X-ray: Windows of EDS detectors
  Ultrathin window (UTW) on EDS detector   Beryllium `window' EDS detector
  `Windowless' EDS detector   Atmospheric thin window (ATW) detector
  X-ray absorption in detector windows    
  Spatial resolution of EDS on light element matrices   Spatial resolution dependence on X-ray lines
  Spatial resolution dependence on overvoltages   Spatial resolution of SEM
  EDS spatial resolution depending on EM sample thickness   Effect of beam spreading on EDS spatial resolution
  Degradation of EDS spatial resolution due to specimen contamination   Spatial resolution in EDS technique
  Degradation of EDS spatial resolution due to specimen drift    
  Comparison between XPS and various SIMS    
 
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