Practical beam current of EDS technique in TEM

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Practical Beam Current of EDS Technique in TEM

Table 0502. Practical beam current of EDS technique in TEM.

Application	Probe current	Reference
EDS for GST materials	4 nA	[1]

[1] Morávek, T., Serralta, E., Hladík, L., Chandran, N., Němeček, D., & Stroud, R., Advancing quantitative failure analysis and strain measurements at the nanoscale by using scanning electron diffraction microscopy enhanced by beam precession. In Proceedings of the 50th International Symposium for Testing and Failure Analysis (pp. 434–439). ASM International. https://doi.org/10.31399/asm.cp.istfa2024p0434, 2024.

Practical Electron Microscopy and Database

An Online Book, Second Edition by Dr. Yougui Liao (2006)

Practical Beam Current of EDS Technique in TEM