Practical beam current of STEM technique in TEM

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

Practical Beam Current of STEM Technique in TEM

Table 0502. Practical beam current of STEM technique in TEM. Bright field = BF, and annular dark field = ADF.

Application	Convergence semi-angle	Probe current	Dwell time	Reference
Bright field (BF) and annular dark field (ADF)	10 mrad	100 pA	5 µs	[1]

[1] Morávek, T., Serralta, E., Hladík, L., Chandran, N., Němeček, D., & Stroud, R., Advancing quantitative failure analysis and strain measurements at the nanoscale by using scanning electron diffraction microscopy enhanced by beam precession. In Proceedings of the 50th International Symposium for Testing and Failure Analysis (pp. 434–439). ASM International. https://doi.org/10.31399/asm.cp.istfa2024p0434, 2024.

Practical Electron Microscopy and Database

An Online Book, Second Edition by Dr. Yougui Liao (2006)

Practical Beam Current of STEM Technique in TEM