Chapter/Index: Introduction | A |
B |
C |
D |
E |
F |
G |
H |
I |
J |
K |
L |
M |
N |
O |
P |
Q |
R |
S |
T |
U |
V |
W |
X |
Y |
Z |
Appendix
Xenon (Xe) Ion Sputtering Yield in Milling
| Figure 1170 shows the xenon (Xe) ion sputtering yields on target atoms with different atomic numbers (Z) at Xe energies of 1 and 5 keV.
| Figure 1170. Xe ion sputtering yields (Y) on target atoms with different atomic numbers (Z) at Xe energies of 1 and 5 keV. [3] |
| Table 1170. Examples of Xenon (Xe) ion sputtering yields on different material surfaces. The incident angle is the angle of incidence with respect to target normal. |
| Atomic number |
|
Xe ion sputtering yields (atoms/ion or molecules/ion) |
Note |
| Voltage |
100 eV |
200 eV |
300 eV |
600 eV |
16 kV |
|
| Angle |
0 degree |
0 degree |
0 degree |
0 degree |
|
|
| 1 |
H |
|
|
|
|
|
|
| 2 |
He |
|
|
|
|
|
|
| 3 |
Li |
|
|
|
|
|
|
| 4 |
Be |
|
0.12 |
0.24 |
0.42 |
|
|
| 5 |
B |
|
|
|
|
|
|
| 6 |
C |
|
0.04 |
0.08 |
0.21 |
|
|
| 7 |
N |
|
|
|
|
|
|
| 8 |
O |
|
|
|
|
|
|
| 9 |
F |
|
|
|
|
|
|
| 10 |
Ne |
|
|
|
|
|
|
| 11 |
Na |
|
|
|
|
|
|
| 12 |
Mg |
|
|
|
|
|
|
| 13 |
Al |
0.06 |
0.24 |
0.45 |
1.02 |
|
|
| 14 |
Si |
|
0.08 |
0.21 |
0.51 |
|
|
| 15 |
P |
|
|
|
|
|
|
| 16 |
S |
|
|
|
|
|
|
| 17 |
Cl |
|
|
|
|
|
|
| 18 |
Ar |
|
|
|
|
|
|
| 19 |
K |
|
|
|
|
|
|
| 20 |
Ca |
|
|
|
|
|
|
| 21 |
Sc |
|
|
|
|
|
|
| 22 |
Ti |
|
0.11 |
0.24 |
0.50 |
|
|
| 23 |
V |
0.05 |
0.20 |
0.39 |
0.72 |
|
|
| 24 |
Cr |
0.13 |
0.44 |
0.83 |
1.90 |
|
|
| 25 |
Mn |
0.08 |
0.44 |
0.60 |
1.67 |
|
|
| 26 |
Fe |
0.06 |
0.29 |
0.54 |
1.20 |
|
|
| 27 |
Co |
0.09 |
0.38 |
0.61 |
1.30 |
|
|
| 28 |
Ni |
0.10 |
0.37 |
0.71 |
1.48 |
|
|
| 29 |
Cu |
0.26 |
0.79 |
1.29 |
2.44 |
|
|
| 30 |
Zn |
|
|
|
|
|
|
| 31 |
Ga |
|
|
|
|
|
|
| 32 |
Ge |
0.08 |
0.31 |
0.54 |
1.20 |
|
|
| 33 |
As |
|
|
|
|
|
|
| 34 |
Se |
|
|
|
|
|
|
| 35 |
Br |
|
|
|
|
|
|
| 36 |
Kr |
|
|
|
|
|
|
| 37 |
Ru |
|
|
|
|
|
|
| 38 |
Sr |
|
|
|
|
|
|
| 39 |
Y |
|
|
|
|
|
|
| 40 |
Zr |
0.03 |
0.18 |
0.31 |
0.74 |
|
|
| 41 |
Nb |
0.02 |
0.17 |
0.31 |
0.61 |
|
|
| 42 |
Mo |
0.06 |
0.28 |
0.51 |
1.05 |
|
|
| 43 |
Tc |
|
|
|
|
|
|
| 44 |
Ru
|
0.05 |
0.37 |
0.71 |
1.42 |
|
|
| 45 |
Rh |
0.12 |
0.51 |
0.84 |
1.60 |
|
|
| 46 |
Pd |
0.34 |
0.93 |
1.39 |
2.48 |
|
|
| 47 |
Ag |
0.40 |
1.05 |
1.80 |
4.20 |
|
|
| 48 |
Cd |
|
|
|
|
|
|
| 49 |
In |
|
|
|
|
|
|
| 50 |
Sn |
|
|
|
|
|
|
| 51 |
Sb |
|
|
|
|
|
|
| 52 |
Te |
|
|
|
|
|
|
| 53 |
I |
|
|
|
|
|
|
| 54 |
Xe |
|
|
|
|
|
|
| 55 |
Cs |
|
|
|
|
|
|
| 56 |
Ba |
|
|
|
|
|
|
| 57 |
La |
|
|
|
|
|
|
| 58 |
Ce |
|
|
|
|
|
|
| 59 |
Pr |
|
|
|
|
|
|
| 60 |
Nd |
|
|
|
|
|
|
| 61 |
Pm |
|
|
|
|
|
|
| 62 |
Sm |
|
|
|
|
|
|
| 63 |
Eu |
|
|
|
|
|
|
| 64 |
Gd |
|
|
|
|
|
|
| 65 |
Tb |
|
|
|
|
|
|
| 66 |
Dy |
|
|
|
|
|
|
| 67 |
Ho |
|
|
|
|
|
|
68
|
Er |
|
|
|
|
|
|
69
|
Tm |
|
|
|
|
|
|
70
|
Yb |
|
|
|
|
|
|
71
|
Lu |
|
|
|
|
|
|
72
|
Hf |
|
0.30 |
0.55 |
1.17 |
|
|
73
|
Ta |
0.05 |
0.32 |
0.50 |
1.00 |
|
|
74
|
W |
0.03 |
0.35 |
0.60 |
1.18 |
|
|
75
|
Re |
0.02 |
0.31 |
0.80 |
1.40 |
|
|
76
|
Os |
0.03 |
0.39 |
0.74 |
1.53 |
|
|
77
|
Ir |
0.05 |
0.52 |
0.86 |
1.79 |
|
|
78
|
Pt |
0.19 |
0.72 |
1.25 |
2.23 |
|
|
79
|
Au |
0.16 |
1.00 |
1.83 |
3.10 |
30 |
|
80
|
Hg |
|
|
|
|
|
|
81
|
Tl |
|
|
|
|
|
|
82
|
Pb |
|
|
|
|
|
|
83
|
Bi |
|
|
|
|
|
|
84
|
Po |
|
|
|
|
|
|
85
|
At |
|
|
|
|
|
|
86
|
Rn |
|
|
|
|
|
|
87
|
Fr |
|
|
|
|
|
|
88
|
Ra |
|
|
|
|
|
|
89
|
Ac |
|
|
|
|
|
|
90
|
Th |
0.08 |
0.35 |
0.60 |
1.22 |
|
|
| 91 |
Pa |
|
|
|
|
|
|
| 92 |
U |
|
0.24 |
0.45 |
1.00 |
|
|
| |
|
|
|
|
|
|
| |
|
|
|
|
|
|
| Reference |
|
[1] |
[1] |
[1] |
[1] |
[2] |
|
[1] D. Rosenberg, G.K. Wehner, J. Appl. Phys. 33 (1962) 1842.
[2] Szymczak W and Wittmaack K 1993 Nucl. Insrum. Meths. B 82 220-233.
[3] M.P. Seah, An accurate semi-empirical equation for sputtering yields, II: for neon, argon and xenon ions, Nuclear Instruments and Methods in Physics Research B 229 (2005) 348–358.
|
