Step Size Used for Beam Damage Reduction during Elemental Mapping

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Step Size Used for Beam Damage Reduction during Elemental Mapping

Increasing the step size of electron beam for elemental mapping and line scan can be used to reduce the beam damage on TEM sample. For instance, Figure 1279 shows three different step sizes. Beam step overlaps in Figure 1279 (a) during elemental mapping, which has the highest beam damage on TEM sample among the three cases. However, Figure 1279 (c) shows the least beam-damage in the three cases. Unfortunately, the spatial resolution in Figure 1279 (c) has been significantly degraded and is twice of the probe size.

Step Size Used for Beam Damage Reduction during Elemental Mapping

Figure 1279. Beam step used in elemental mapping: (a) Step size is smaller than probe size, (b) Step size is equal to probe size, and (c) Step size is twice of probe size. The green disks represent the probe size.

Practical Electron Microscopy and Database

An Online Book, Second Edition by Dr. Yougui Liao (2006)

Step Size Used for Beam Damage Reduction during Elemental Mapping