Comparison between FIB and Ar (argon) Ion Milling Specimen Preparations - Practical Electron Microscopy and Database - - An Online Book - |
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Microanalysis | EM Book https://www.globalsino.com/EM/ | |||||||||||||||||
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Table 1280. Comparison between FIB and Ar (argon) milling specimen preparations.
Figure 1280 shows TEM images from two steel specimens which were generated by FIB technique and Ar+ ion milling, respectively. It is very clear that the FIB-prepared specimen received severe surface damage, but the specimen from Ar+ ion milling is much cleaner.
[1] J. Scott, F. T. Docherty, M. MacKenzie, W. Smith, B. Miller, C. L. Collins and A. J. Craven, Sample preparation for nanoanalytical electron microscopy using the FIB lift-out method and low energy ion milling, J. Phys.: Conf. Ser. 26, 223 (2006).
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