Practical Electron Microscopy and Database

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

CMOS Failure Mechanisms in FinFET Technology

Table 1294. CMOS failure mechanisms in FinFET technology. FinFETs Node Test polarity Failure mechanism [1] MOSFET 65 nm Positive FinFET drain [1] Drain-to-source Molten silicon [1] 45 nm Positive FinFET drain [1] Drain-to-source Molten silicon [1] 32 nm Positive FinFET drain [1] Drain-to-source Molten silicon [1] Diode-configured FinFET 65 nm Positive FinFET fin region [1] Drain-to-source [1] 45 nm Positive FinFET fin region [1] Drain-to-source [1] 32 nm Positive FinFET fin region [1] Drain-to-source [1] FinFET   Positive p+/n+ fin region [1] p-n gated diode   Anode-to-cathode Uniform conduction [1]                         [1] Steven H. Voldman, ESD: Failure Mechanisms and Models, 2009.