 |
||||||||
Specimen Quality Depending on Sample Tilting in FIB - Practical Electron Microscopy and Database - - An Online Book - |
||||||||
| Microanalysis | EM Book https://www.globalsino.com/EM/ | ||||||||
| ================================================================================= | ||||||||
In general, in FIB-TEM specimen preparations, a sample tilt angle of ±2° from the vertical position provides optimum wedge removal conditions, and thus the milled film remains crystalline. The degree of amorphization/phase transformation is higher for greater tilt angles.
|
||||||||
| ================================================================================= | ||||||||
|
|
||||||||