Period
Wafer diameter Wafer thickness (μm)
(inch) (mm)  
  1 25  
  2 51 275
1970-1975
3 76 375
1975-1980 4 100 450-500
1980-1985 4.9?or 5 125 or 130 525-625
1985-1990 ~6 (5.9) 150 675
1990-1995 ~8 (7.9) 200 725
1995-present ~12 (11.8) 300 770

 

~18 (17.7) 450 925