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Electrical Properties of Silicides
- Practical Electron Microscopy and Database -
- An Online Book - |
Microanalysis | EM Book http://www.globalsino.com/EM/ |
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================================================================================= |
Table 2036_a. Electrical properties of silicides.
Silicides |
Resistivity (µΩ-cm) |
Sheet resistance for a 200-nm thick film (Ω/□) |
Direct band gap (eV)
|
Indirect band gap (eV) |
(Schottky) barrier
height to
n-Si (eV) |
|
Electro- migration problems |
Al |
|
|
|
|
|
|
yes |
Co2Si |
~70 |
|
|
|
|
|
|
CoSi |
100-150 |
|
|
|
0.68 |
680 |
|
|
|
|
|
|
0.65 |
640 |
|
CoSi/Co2Si |
|
|
|
|
|
|
|
Cr3Si |
|
|
|
|
|
|
|
CrSi2 (C11b) |
|
|
0.5-0.9 |
0.35-0.67 |
|
570 |
|
CrSi2 (C40) |
600 |
|
0.5-0.9 |
0.35-0.67 |
0.57 |
|
|
Cu3Si |
|
|
|
|
|
|
|
α-FeSi2 |
|
|
|
|
|
|
|
β-FeSi2 |
>1000 |
|
0.83–0.89 |
0.765–0.79 |
|
|
|
HfSi |
|
|
|
|
0.53 |
530 |
|
HfSi2 |
45-50 |
|
|
|
|
|
|
IrSi |
|
|
|
|
0.93 |
930 |
|
IrSi3 |
|
|
|
|
0.94 |
|
|
Ir2Si3 |
|
|
|
|
0.85 |
|
|
Ir3Si5 |
|
|
1.2–1.57 |
|
|
|
|
MnSi |
|
|
|
|
0.76 |
760 |
|
MnSi2-x |
|
|
0.68-0.83 |
0.45–0.47 |
|
|
|
MnSi2 |
|
|
|
|
|
|
|
Mn11Si19 |
|
|
|
|
|
720 |
|
Mo5Si3 |
|
|
|
|
|
|
|
MoSi2 (C11b) |
40-110 |
|
|
|
|
550 |
|
MoSi2 (C40) |
90 |
|
|
|
|
|
|
|
|
2-5.5 |
|
0.05 |
0.55-0.64 |
570 |
|
Nb/Nb5Si3 |
|
|
|
|
|
|
|
Nb5Si3 (D8b) |
|
|
|
|
|
|
|
NbSi2 |
50 |
|
|
|
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|
NbSi2 (C11b) |
|
|
|
|
|
|
|
NbSi3 |
|
|
|
|
|
|
|
Ni |
7–10 |
|
|
|
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|
|
NiSi |
10-20 |
|
|
|
0.7 |
660 - 750 |
|
NiSi2 |
35-50 |
|
|
|
0.66 |
700 |
|
Ni2Si |
24–30 |
|
|
|
0.7 |
700 - 750 |
|
Ni3Si |
80–90 |
|
|
|
|
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|
Ni3Si2 |
60–70 |
|
|
|
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Ni31Si12 |
90–150 |
|
|
|
|
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|
OsSi |
|
|
0.34 |
|
|
|
|
OsSi2 |
|
|
1.4–1.8 |
|
|
|
|
Os2Si3 |
|
|
2.3 |
|
|
|
|
Pd2Si |
30-35 |
1.5-1.75 |
|
|
0.74 |
720 - 750 |
|
PtSi |
|
1.5-1.75 |
|
|
0.84-0.87 |
840 - 880 |
|
Pt2Si |
|
|
|
|
0.78 |
|
|
ReSi2 (C11b) |
|
|
0.16–0.2 |
|
|
|
|
RhSi |
|
|
|
|
0.74 |
690 |
|
Ru2Si3 |
|
|
0.44–0.7 |
0.12–0.15 |
|
|
|
Ta5Si3 (C40) |
|
|
|
|
|
|
|
Ta5Si3 |
|
|
|
|
|
|
|
|
|
1.75-3.5 |
|
|
0.59 |
600 |
|
Ti5Si3 (D8m) |
|
|
|
|
|
|
|
Ti5Si3 |
|
|
|
|
|
|
|
Ti/Ti5Si3 |
|
|
|
|
|
|
|
TiSi2 (C49) |
60-70 |
|
|
|
|
600 |
|
|
|
0.75-1.25 |
|
|
0.58-0.60 |
600 |
|
VSi2 |
50-55 |
|
|
|
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|
V3Si |
|
|
|
|
|
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|
VSi2 (C11b) |
|
|
|
|
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VSi2(C40) |
|
|
|
|
0.65 |
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W5Si3 |
|
|
|
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|
WSi2 (C40) |
|
|
0.44 |
0.07 |
|
|
|
|
|
1.5-5 |
|
|
0.67 |
650 |
|
ZrSi2 |
35-40 |
|
|
|
0.55 |
550 |
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================================================================================= |
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