Electron microscopy
 
Electrical Properties of Silicides
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Table 2036_a. Electrical properties of silicides.

Silicides
Resistivity (µΩ-cm)
Sheet resistance for a 200-nm thick film (Ω/□)
Direct band gap (eV)
Indirect band gap (eV)
(Schottky) barrier
height to
n-Si (eV)
Barrier height on n-Si (mV)
Electro- migration problems
Al            
yes
Co2Si
~70
 
CoSi
100-150
0.68
680
 
CoSi2
14-28
0.65
640
 
CoSi/Co2Si
 
Cr3Si
 
CrSi2 (C11b)
0.5-0.9
0.35-0.67
570
 
CrSi2 (C40)
600
0.5-0.9
0.35-0.67
0.57
 
Cu3Si
             
α-FeSi2
 
β-FeSi2
>1000
 
0.83–0.89
0.765–0.79
     
HfSi
0.53
530
 
HfSi2
45-50
           
IrSi
0.93
930
 
IrSi3        
0.94
   
Ir2Si3        
0.85
   
Ir3Si5    
1.2–1.57
       
MnSi
0.76
760
 
MnSi2-x
0.68-0.83
0.45–0.47
 
MnSi2
             
Mn11Si19
720
 
Mo5Si3
 
MoSi2 (C11b)
40-110
550
 
MoSi2 (C40)
90
 
MoSi2
20-110
2-5.5
0.05
0.55-0.64
570
 
Nb/Nb5Si3
 
Nb5Si3 (D8b)
 
NbSi2
50
 
NbSi2 (C11b)
 
NbSi3
 
Ni
7–10
           
NiSi
10-20
0.7
660 - 750
 
NiSi2
35-50
0.66
700
 
Ni2Si
24–30
0.7
700 - 750
 
Ni3Si
80–90
           
Ni3Si2
60–70
           
Ni31Si12
90–150
           
OsSi    
0.34
       
OsSi2    
1.4–1.8
       
Os2Si3    
2.3
       
Pd2Si
30-35
1.5-1.75
0.74
720 - 750
 
PtSi
28-35
1.5-1.75
0.84-0.87
840 - 880
 
Pt2Si        
0.78
   
ReSi2 (C11b)
0.16–0.2
 
RhSi
0.74
690
 
Ru2Si3    
0.44–0.7
0.12–0.15
     
Ta5Si3 (C40)
 
Ta5Si3
 
TaSi2(C40)
10-70
1.75-3.5
0.59
600
 
Ti5Si3 (D8m)
 
Ti5Si3
 
Ti/Ti5Si3
 
TiSi2 (C49)
60-70
600
 
TiSi2 (C54)
12-25
0.75-1.25
0.58-0.60
600
 
VSi2
50-55
           
V3Si
 
VSi2 (C11b)
 
VSi2(C40)
0.65
 
W5Si3
 
WSi2 (C40)
0.44
0.07
 
WSi2 (C11b)
30-120
1.5-5
0.67
650
 
ZrSi2
35-40
0.55
550
 

 

 

 

 

 

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