Practical Electron Microscopy and Database

EELS analysis and interpretation are inherently difficult due to the large number of electronic processes that could potentially give rise to particular energy losses. Fortunately, in many cases it is unnecessary to precisely understand the origin of each loss feature in order to utilize EELS in studies of material properties. However, in all cases, reference spectra from well-characterized materials and knowledge of origin of the loss features are still needed.

Many analysis techniques can be used to study the measured spectra, for instance:
        i) Absolute normalization. Each spectrum is normalized to a single incident electron. Absolute normalization requires direct comparison of the measured spectrum with theoretically predicted cross-sections; therefore, obtaining such normalization is difficult.
        ii) Relative normalization. In this case, some peaks of the EELS data are normalized relative to others.