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Electron energy loss spectroscopy (EELS) measures the spectral distribution of energy transferred from an incident electron beam into a specimen. In general, there are mainly two types of fundamental methods: Electron monochromator [1] has improved the EELS energy resolution about 3-fold, to ~10 meV. At such high energy resolution, vibrational spectroscopy is available in the electron microscope [2]. As shown in the vibrational spectrum in Figure 2398, the different peaks can be assigned to different types of bonds and vibration modes.
[1]
O. L. Krivanek et al., Microscopy 62 (2013) 3-21.
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