Elastic Relaxation due to TEM-specimen Thinning
- Practical Electron Microscopy and Database -
- An Online Book -


This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.


TEM specimens after prepared from bulk materials can be elastically relaxed. The elastic relaxation of the thin specimens, consisting of stacked layers, may induce bending of some atomic planes at the two specimen surface. Due to elastic relaxation in thin TEM specimens, split HOLZ lines in CBED patterns are often observed.

In strain analysis with CBED technique, because of the elastic relaxation caused by the specimen thinning when the specimen is ≤ 100 nm, change of stress occurs after the specimen preparation, and then makes the analysis difficult. In many cases, CBED analysis is done by reducing the elastic relaxation using thick specimens (e.g. ~600 nm) and by removing the inelastically scattered electrons by means of an electron energy filter.




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