Accuracy of Strain Measurement by CBED
- Practical Electron Microscopy and Database -
- An Online Book -  

This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.


A highly accurate measurement with CBED technique can be achieved through the analysis of higher-order Laue zone (HOLZ) patterns using the least-square fitting of distances of HOLZ line intersections between the observations and calculations.

Note that the accuracy of strain measurements by using CBED technique is affected by broadening and/or splitting of the HOLZ lines that is induced by curvature of atomic lattice.



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