Development history of X-ray analysis for EMs

Development History of X-ray Analysis for EMs
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Table 2524. The detailed development history of X-ray analysis in EMs.

Date	Name/organization	Milestone
2004		UltraDry Silicon Drift detector
2001		SuperDryII LN-free detector
1995		CryoCooled liquid nitrogen-free detector
1994		Freedom liquid nitrogen-free detector
1994		Digital pulse processor
1982		Light-element pulse processor
1980		Time-variant pulse processor
1973		MicroTrace SEM detector 165 eV. Reed and Ware [3] demonstrated that quantitative analysis of silicate minerals for elements with atomic number 11 and above could be achieved by EDXS with limit of detection around 0.001 mass fraction and with an accuracy equivalent to WDS.
1972		Suggested that the source of error was primarily deconvolution of overlapping peaks and background correction. [4]
1968		Developed solid state EDS detectors & Kevex SEM detector
1965		Commercial production of SEM began
Mid 1960s		Developed a semiconductor radiation detector at the Lawrence Berkeley Laboratory that heralded the advent of energy-dispersive x-ray spectrometry, or x-ray energy spectrometry (XES).
1956		Commercial production of electron microprobe began (Cameca)
1951		Castaing’s thesis. [2] In the two decades following this thesis, x-ray intensities were measured with high resolution Bragg crystal “wavelength dispersive” spectrometers (WDS).
1949	Castaing	Built first electron microprobe for microchemical analysis (with crystal focusing wavelength dispersive spectrometer) for Ph.D at University of Paris, and developed the basic theory
1948		Developed a prototype for the first modern commercial x-ray spectrometer
1942		First use of SEM to examine surfaces of thick specimens at RCA Labs
1940		RCA sold first commercial TEM outside Germany
1930s		Scanning coils added to TEM, producing STEM (image produced by secondary electrons emitted by specimen)
1932	Ernst Ruska (belated Nobel prize for it in 1986) in Germany	First demonstration of TEM
Late 1920s	Siemens & Halske Co in Germany	Built TEM, but WWII prevented sale and use outside Germany
1923	von Hevesy	Discovered Hf after noticing a gap at Z = 72
1922	Hadding	Used X-ray spectra to chemically analyze minerals
1920s		Designed curved X-ray spectrometers
1913	Braggs	Obtained the first X-ray spectrum of Pt using an NaCl crystal (it's the Law: nλ = 2d sin θ)
1913	Mosely	Found that there was a systematic variation of the wavelength of characteristic X-rays from various elements ( wavelength inversely proportional to Z squared )
1912	Friedrich and Knipping	Confirmed that X-rays could be diffracted by crystals with lattice spacings of similar dimension
Early 1900s	Kaye [1]	Demonstrated the use of electrons to produce X-rays which were characteristic of specific elements
1895	Roentgen	Discovered X-rays, produced by electron bombardment of inert gas in tubes; gas fluoresces and nearby photographic plates are exposed (X-rays' wavelength = 0.05 - 100 Å)
Late 1800s	Starke [1]	Suggested an electron source could generally distinguish materials of different compositions

[1] Scott VD, Love G (1983) Quantitative electron-probe microanalysis. Wiley, New York.
[2] R. Castaing, Application des sondes electroniques a une methode d’analyse ponctuelle chimique et cristallographique, Thesis, University of Paris, O.N.E.R.A. Publ. No 55 (1951).
[3] S. J. B. Reed and N. G. Ware, Quantitative Electron Microprobe Analysis Using a Lithium Drifted Silicon Detector, X-Ray Spectrometry 2, 69-74 (1973).
[4] D. R. Beaman and L. F. Solosky, Accuracy of Quantitative Electron Probe Microanalysis with Energy Dispersive Spectrometers, Anal. Chem. 44 (9), 1598-1610 (1972).

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