Electron Beam Damage Depending on TEM/SEM Specimen Thickness
- Practical Electron Microscopy and Database -
- An Online Book -


This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.


Comparing with SEM analysis on bulk materials, the smaller excited volumes in the thin film specimen in the S/TEM measurements can induce radiation damage of beam-sensitive materials before the analysis is completed.




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