Practical Electron Microscopy and Database

In situ FIB (Focused Ion Beam) lift-out is a technique used for preparing thin samples for transmission electron microscopy (TEM) directly within the FIB system, offering certain advantages over traditional methods. Unlike conventional lift-out techniques, where the sample is often moved between systems for processing, in situ lift-out allows the sample to be manipulated, thinned, and attached to the TEM grid without leaving the FIB system. This approach allows for continuous refinement of the sample, including further thinning, after it has been inspected in the TEM.

The in situ lift-out process begins with partial thinning of the sample within the FIB. The partially thinned section is then lifted directly from the substrate and attached to a TEM grid using a platinum (Pt) deposition process within the FIB. After being attached, the sample undergoes further thinning to achieve electron transparency, making it suitable for high-resolution TEM analysis. This integrated workflow improves efficiency and enables more precise control over the sample preparation process, ensuring better quality for TEM imaging.