TEM Specimen Traverse Induced by Beam Tilt
- Practical Electron Microscopy and Database -
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If the specimen is at a different height, for instance, it is not at Eucentric height, the beam-illuminating location is not affected by beam shift as shown in Figure 2755 (b), but it is clearly affected by beam tilt as shown in Figure 2755 (a). In order to eliminate this effect in the tilting case, we have to re-adjust the strength ratios of the two deflectors B1 and B2.

Schematic illustration showing the difference of specimen traverses in both beam tilting and beam shifting process

Figure 2755. Schematic illustration showing the difference of specimen traverses in both beam tilt and beam shift process.

 

 

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