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The inelastic scattering of electrons occurs at smaller angles than that for elastic scattering. Figure 2864 shows an example of angular-resolved electron scattering profiles in logarithmic scale. The reference spectrum (vacuum) in blue is dominated by unscattered electrons in the range −4 to 4 mrad. Due to the scattering of the incident electrons with a rhenium (Re) TEM specimen, the modified spectrum in red was formed.

Figure 2864. An example of angular-resolved electron scattering profiles of electrons in vacuum and Re film in logarithmic scale. The reference spectrum (vacuum) is dominated by unscattered electrons in the range −4 to 4 mrad.
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[1] Konstantin Iakoubovskii and Kazutaka Mitsuishi, Elastic scattering of 200 keV electrons in elemental solids: experimental observation of atomic-number-dependent oscillatory behavior, J. Phys.: Condens. Matter 21 (2009) 155402.
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