Electron microscopy
Limits of EDS Measurements
- Practical Electron Microscopy and Database -
- An Online Book -
Microanalysis | EM Book                                                                                   https://www.globalsino.com/EM/        

This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.


There are mainly three quantifiable limits to microanalysis with EDS measurements:
        i) Sensitivity (or called detection limit or minimum detectable mass).
        ii) Absolute accuracy of quantification.
        iii) Spatial resolution.

Other limits include specimen contamination, insensitivity to elements with low atomic number (Z), and specimen preparation (e.g. for microelectronic devices) and geometry of the detecting systems.




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