Electron microscopy
SEM Observation Related to SiO2
- Practical Electron Microscopy and Database -
- An Online Book -
Microanalysis | EM Book                                                                                   https://www.globalsino.com/EM/        

This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.


At 15 kV of accelerating voltage of the incident electron beam in dual-beam SEM/FIB, the interaction volume for generation of secondary electrons (SEs) is on the order of microns through SiO2 in microelectronic materials, which allows identification of a defect before actually milling through it.



The book author (Yougui Liao) welcomes your comments, suggestions, and corrections, please click here for submission. If you let book author know once you have cited this book, the brief information of your publication will appear on the “Times Cited” page.