Spatial Resolution Limit Affected by Aberrations in EMs
- Practical Electron Microscopy and Database -
- An Online Book -  

This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.


The spatial resolution of aberration-uncorrected EMs is worse than that of aberration-corrected EMs. For instance, it is very common that the resolution limit of an uncorrected 200 kV TEM is approximately 2 Å. This resolution does not satisfy to resolve some details of atomic structures such as interfaces, stacking faults, and grain boundaries, which are important microscopic defects determining the macroscopic properties of solid materials. This actually has been the major reason for the ongoing struggle to eliminate the spherical aberrations and further chromatic aberrations.




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