Correction of Electron Beam Distortion in EMs
- Practical Electron Microscopy and Database -
- An Online Book -  

This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.


Figure 3657a shows a hexapole (or called sextupole) design which can be used to correct a triangular distortion to the electron beam. The optical axis, along which the electrons travel, is into the page. indicates the direction of the electron beam. The blue lines represent the magnetic field lines, while the red line represents the Lorentz force on the electrons.

The hexapole design for spherical aberration (Cs) correction

Figure 3657a. The schematic illustration of a hexapole design.

Figure 3657b shows an octupole design, which can be used to adjust a square distortion to the beam.

octupole design for spherical aberration (Cs) correction.

Figure 3657b. The schematic illustration of an octupole design.







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