Accuracies of Beam Tilt & of Alignment of Zone Axis
- Practical Electron Microscopy and Database -
- An Online Book -  

This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.


A deflector for electron-beam deflection in EMs has been applied to align, tilt, shift, scan the electron beam, and so on. The deflector, usually including a pair of deflection coils, is called the double-deflection system.

It is very common that the TEM sample tilt has misorientations more than 2 mrad around a crystalline zone axis of the sample unless the operator sometimes is very lucky and has occasionally aligned the sample to an exact zone axis. For nanostructure e.g. nanowires, the misorientations can be even larger because the diffraction spots used for tilt alignment are weaker and thus it is harder to align it.




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