EDS Quantification of Heavy Elements
- Practical Electron Microscopy and Database -
- An Online Book -



This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.



For the elemental quantification based on low-energy x-rays, e.g. K-peaks from light elements, the k-factors depend on x-ray absorption in the detector window and within the specimen itself. Because of the inaccuracy of the absorption correction, the elemental quantification of light elements based on EDS is normally worse than that for heavier elements.

For heavy elements, the L- and M-radiations in EDS measurements are normally used.

Peak overlapping occurs often in EDS profiles, for instance, in some K-peaks of light elements and some L-peaks of heavier elements. This overlapping occurs within the energy resolution of EDS system.





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