An Ar (argon)-implanted damaged layer was observed in Ar-ion-milled silicon (Si) TEM specimens . This damaged layer induced asymmetric dark-field rocking curves and thus modified the intensity of most of the diffracted beams. Such phenomenon was also identified in Ar-milled diamond TEM film .
Note that the implanted Argon in TEM specimens is detectable by EELS and EDS techniques.
 R. Vincent, T. D. Walsh, M. Pozzi, Ultramicroscopy 76 (1999) 125.
 D. M. Bird, J. C. Walmsley, R. Vincent, EMAG 83, Institute of Physics. Conference. Series. No 68, 1983, p. 41.