The advantages of FIB-TEM sample preparation include site specificity at the sub-micrometer scale and homogeneous thinning of the samples consisting of multi-layers of different phases or containing two-phase interfaces.
Except that basic requirements of TEM specimen need to be paid attention to, additional requirements in FIB-TEM sample preparation are:
i) Minimize the amorphised layers on the two surfaces of the specimen,
ii) Minimize the surface contamination and damage caused by the Ga+ beam ,
iii) Avoid bending of the thin foil ,
iv) The specimen is thick enough so that the unaffected materials can still represent the bulk material which is studied.
 Hata, S. et al. (2006) Removing focused ion-beam damages on
transmission electronmicroscopy specimens by using a plasma cleaner.
J. ElectronMicrosc. 55, 23–26.
 Huang, Z. (2004) Combining Ar ion milling with FIB lift-out techniques
to prepare high quality site-specific TEM samples. J. Microsc. 215, 219 -