Practical Electron Microscopy and Database

Most TEM specimens are so thick that plural scattering, such as elastic - inelastic, inelastic - inelastic, and elastic - elastic, is usually significant. The plural scattering is generally unwanted since it distorts the shape of the energy-loss spectrum. To avoid electron plural (multiple) scattering with matter, the TEM sample should be very thin (t ≤ λ_el ≤ λ_in). Here, λ_el and λ_in are mean free paths of elastic and inelastic scattering. For instance, a 4 nm thickness (t) of pure Ti film would not cause significant plural scattering.