Practical Electron Microscopy and Database

An Online Book, Second Edition by Dr. Yougui Liao (2006)

Practical Electron Microscopy and Database - An Online Book

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

Secondary Ion Mass Spectrometry (SIMS)

Secondary ion mass spectrometry (SIMS) uses various ions for sputtering of sample surfaces. In SIMS, a primary beam of ions with energies typically between 10 and 20 keV is generated, accelerated and focused onto the surface of a target.