Spherical Aberration depending on Working Distance in SEM
- Practical Electron Microscopy and Database -
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This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.



Spherical aberration of the probe-forming lens is increased with the increase of working distance, resulting in a larger electron-probe size. Therefore, the need to have better spatial resolution of scanning electron microscope (SEM) leads to shorten the working distance and consequently to change the SEM detector position.



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