Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix
| Spherical aberration of the probe-forming lens is increased with the increase of working distance, resulting in a larger electron-probe size. Therefore, the need to have better spatial resolution of scanning electron microscope (SEM) leads to shorten the working distance and consequently to change the SEM detector position.
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