Electron Probe MicroAnalyzer (EPMA)
- Practical Electron Microscopy and Database -
- An Online Book -



This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.



Electron probe micro-analyzer (EPMA) is also informally called an electron microprobe, or just probe. In this technique, a very narrow beam of high-energy electrons is focused on a sample surface. As the accelerated electrons penetrate the sample their energy is first released into and then re-emitted from the sample, via different processes giving rise to different types of signals, each of which carries information about some property of the sample. These signals can be used for secondary-electron imaging (SEI), back-scattered electron imaging (BSE), cathodoluminescence imaging (CL), acquiring 2D element maps, acquiring compositional information by energy-dispersive spectroscopy (EDS) and wavelength-dispersive spectroscopy (WDS), and analyzing crystal-lattice preferred orientations (EBSD).



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