Practical Electron Microscopy and Database

An Online Book, Second Edition by Dr. Yougui Liao (2006)

Practical Electron Microscopy and Database - An Online Book

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

Inelastic Scattering Mechanisms

Inelastic scattering occurs between fast electrons and atomic electrons, causing excitation of the latter.

  • Inner-shell electron excitation leads to energy loss and ionization, with energy released as x-rays or Auger electrons.
  • Outer-shell electrons can undergo single-electron excitation, resulting in secondary electron emission or heat.
  • Alternatively, inelastic scattering may involve plasmon excitation, where valence electrons oscillate collectively. Plasmons, with energy typically between 5–30 eV, decay quickly, transferring energy as heat or creating secondary electrons. Surface plasmons can also be excited in very thin samples (<20 nm).
  • Plasmon excitation is more common in materials with free electron behavior, while in others, single-electron excitation dominates.