Practical Electron Microscopy and Database

An Online Book, Second Edition by Dr. Yougui Liao (2006)

Practical Electron Microscopy and Database - An Online Book

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

Soft X-Rays

In EDS analysis, some are very "soft" (low energy) X-rays such as those produced by excited oxygen atoms.

Figure 4647 shows the escape depths of various species generated by high-energy electrons penetrating into a solid. Auger electrons and "soft" X-rays are emitted in depth of <1 nm and in diameter of beam size, secondary electrons are emitted in depth of < 10 nm and in diameter of beam size, and the emission depths and diameters of backscattered electrons and "hard" X-rays depend on both the beam energy and beam size.

Escape depths of various species generated by high-energy electrons penetrating into a solid

Figure 4647. Escape depths of various species generated by high-energy electrons penetrating into a solid.

In comparison between the emissions of Auger electrons and “soft” X-rays, for electron irradiation of high atomic-number (Z) elements, Auger electron emission predominates, while for irradiation of low Z elements, “soft” X-rays predominate.