Practical Electron Microscopy and Database

High Angle Elastic Scattering of Ions refers to the process in which ions are deflected at large angles as they pass through a material without losing energy, but rather by transferring momentum to the atoms in the material. This type of scattering occurs when an incident ion interacts with the atomic nuclei of the material, resulting in a significant deflection due to the strong Coulomb forces between the positively charged ion and the nucleus. High angle elastic scattering is a critical phenomenon in techniques such as Rutherford Backscattering Spectrometry (RBS) and Ion Beam Analysis (IBA), where it is used to probe the structural and compositional characteristics of materials. The angular distribution and intensity of the scattered ions provide valuable information about the atomic number, depth distribution, and crystallinity of the target material. Because this scattering involves minimal energy loss, the ions retain their initial kinetic energy, allowing for precise analysis of the material's surface and near-surface regions. Understanding high angle elastic scattering is essential for optimizing these analytical techniques and for gaining insights into the material's atomic structure and composition.