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In EM measurements, electrons also scatter inelastically with phonons. These energy losses are of the order of a few tens of millielectronvolts (meV) and can therefore not be detected with transmission EELS measurement in an electron microscope. However, these quasi-elastic scattering processes broaden the zero-loss peak of EELS on the high-energy side.

In EM systems, the development of energy-filtered imaging attachments [1 - 5] has allowed removing the intensity from electrons scattered inelastically by any mechanism other than phonon scattering.

Diffuse scattering induced by thermal vibrations can be treated as electron–phonon scattering using a Debye phonon model [6 - 7].

Page3375 lists the behaviors and properties of various inelastic electron scatterings in electron interaction with materials, including inter- and intra-band transitions, inner shell ionization, phonon excitation and plasmon excitation.

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[3] K. Tsuno, J. Electron Microsc. 48 (6) (1999) 801–820.
[4] K. Tsuno, T. Kaneyama, T. Honda, Y. Ishida, Nucl. Instrum. Methods A 427 (1–2) (1999) 187–196.
[5] M. Tanada, K. Tsuda, M. Terauchi, K. Tsuno, T. Kaneyama, T. Honda, Y. Ishida, J. Microsc. 194 (1999) 219–227.
[6] P. Rez, C. J. Humphreys and M. J. Whelan: “The distribution of intensity in electron diffraction patterns due to phonon scattering.” Philos. Mag. 35, 81–86 (1977).
[7] C. R. Hall and P. B. Hirsch: “Effect of thermal diffuse scattering on propagation of high energy electrons through crystals.” Proc. R. Soc. (London) A 286, 158 - 177 (1965).